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Factory Integration Update to IRC

Factory Integration Update to IRC. April 23, 2012. Gopal Rao, Peter Csatary, Richard Oechsner, Reiner Missale, Leo Kenny, Dan Mcculley, Makato Yamamoto, Supika Mashiro , Michael Schilp , Markus Pfeffer, Boyd Finlay, Jonathan Chang, Andreas Neuber.

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Factory Integration Update to IRC

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  1. Factory Integration Update to IRC April 23, 2012 Gopal Rao, Peter Csatary, Richard Oechsner,Reiner Missale, Leo Kenny, Dan Mcculley, Makato Yamamoto, SupikaMashiro, Michael Schilp, Markus Pfeffer, Boyd Finlay, Jonathan Chang, Andreas Neuber Gopal Rao / Factory Integration - 2012

  2. FI Discussion Topics @ the Spring F2F: • Table edits for 2013 changes in progress • Need clear 450mm transition dates (2014 or 2015) – Some confusion on our tables • Changes being identified and discussed for updates in 2013 • Vision for each FI sub team under discussion • FICS: Trend is toward managing large amounts of data and better decision support requiring extended computing capabilities, e.g. cloud based storage and mobile computing • ESH: Joint effort on identify sustainability issues in manufacturing • Prod Equip: Migration from reactive to predictive control and management Increased intelligence capability in tools (e.g. auto recovery, self diagnostic and self control capabilities, automated PM, metrology recipe creation integrated with NPI • AMHS: Clarification of 450mm/300mm equivalency assumptions (FI team is not linked to 450mm program • 300mm to 450mm metrics need to be reconciled • E.g. Area of Si vs wafer number processed may generate different actions • Facilities: Overall impact of 450mm transition and process equipment with new utility requirements (e.g. EUV, metrology..) • Possible summit with G450C team and FI/ESH/ERM TWGs in Summer • Joint discussion on roadmap • It will help if IRC can facilitate this Gopal Rao / Factory Integration - 2012

  3. Actions • Marcus/Richard: Develop a comprehensive predictive control systems for FI Roadmap • Dan/Reiner: FICS Actions • Supika: Present Tool Vendor perspective on EDA requirements • Boyd/Leo: FI/Stds teams mapping and interface • Richard/Supika: Physical interface for 450mm handling platform and modules • Leo: What EHS regulations may impact FI • All – Id specific line items in tables that need to change • G450C interface meeting with FI/ITRS in Summer? • Gopal/Jonathan: Define Quality Assurance capability for FI • Boyd: Factory Control plan • All – Go Through your Tables/Potential Solutions/Chapter Write Up • Identify changes • Review in phone meetings • Ratification in Summer F2F meeting Gopal Rao / Factory Integration - 2012

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