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Diffusion Furnace Controller Design

Design new temperature controllers for diffusion furnaces at Microelectronics Research Center, updating analog to digital control for remote monitoring. Project goals include integrating digital controller with current oven and providing computer interface for remote control. Prototype testing, circuit layout, and software implementation deadlines are set. Software includes website login system, database, GUI interface, and testing. Evaluation includes SCR gate current testing and software integration criteria.

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Diffusion Furnace Controller Design

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  1. Diffusion Furnace Controller Design Team 14 Joe Grady James Crow Hongyu Chen Prakalp Sudhakar Victor Villagomez Client/Faculty Advisor: Dr. Gary Tuttle

  2. Project Goals The objective of the senior design project is to design a new set of temperature controllers to use on a set of diffusion furnaces located at the Microelectronics Research Center. The project goals include: Updating analog controlled furnace to a digitally controlled furnace. Implementation of a new digital temperature controller integrated into the current microelectronics oven Providing a computer interface so that temperature of the furnaces can be controlled and monitored remotely.

  3. What is due? • Prototype testing of the hardware – Oct 14 • Revised circuit testing of hardware – Oct 21 • Layout of circuit completed – Oct 28 • Implementation of controller, circuit, oven and software – Nov 14

  4. System Overview

  5. Circuit schematic is done and properly interfaces in theory. Get a bare minimum of 270mA to the SCR gates

  6. Software • Implementation Done • Website login system • Website database • Website basic GUI interface • Testing • Black box testing

  7. To be done Software • Get an USB – RS232 (Serial) Adaptor • Write low level interface in Mac’s Xcode • Write the interface between the webpage and the controller software Testing/Evaluation: • Test RS232 com in Mac • Test the webserver

  8. Two levels of success criteria in this project: Critical level – SCR Gate current must be comfortably above 270mA @ 2V Dream level – Critical level reached plus software integration Assessment of Overall Completion: fully successful, mostly, partially, or unsuccessful

  9. Questions ?

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