Virtual NanoFab A Silicon NanoFabrication Trainer. Nick Reeder, Sinclair Community College Andrew Sarangan , University of Dayton Jamshid Moradmand , Sinclair Community College. Challenge: Providing Hands-on Silicon Nanofabrication Experience.
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Nick Reeder, Sinclair Community College
Andrew Sarangan, University of Dayton
JamshidMoradmand, Sinclair Community College
The structure shown required about 25 steps.
Note that resist above silicon is more fully exposed than resist above aluminum.
SiO2 (blue) after wet etch with hydrofluoric acid: note tapered sidewalls and undercut of photoresist (pink).
SiO2 after dry etch with CF4 plasma: note vertical sidewalls.
Evaporated titanium (gray): accumulates only on horizontal surfaces.
Chemical-vapor-deposited titanium: adheres to vertical surfaces as well as horizontal.