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EFEM- A 300 mm Equipment Front-end Module

Kensington Laboratories offers Performix, a 300mm equipment front-end module (EFEM) wafer handling environment designed for ISO Class 1 specification, to address the growing constraints faced by the semiconductor industry.EFEM- A 300 mm Equipment-Front-end Module

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EFEM- A 300 mm Equipment Front-end Module

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  1. EFEM- A 300 mm EquipmentFront-end Module

  2. Introduction Kensington Laboratories offers Performix, a 300mm equipment front-end module (EFEM) wafer handling environment designed for ISO Class 1 specifications, to address the growing constraints faced by the semiconductor industry.

  3. Performix EFEM EFEM responds to that call with an integrated sub-system for metrology and process equipment that leverages Kensington Laboratories’ 25 years of advanced robotic experience. The result is a product with high reliability, world-class tool availability, and exceptional throughput needed for volume production at the 90 nm technology node and below.

  4. Performance Excellence Performix combines the best of newly developed advanced robotic technologies and industry-proven equipment. Available in 2, 3, and 4 port configurations, the Performixsystem’s monocoque construction, a unibody frame, provides a sturdy foundation for the four major components, each uniquely designed to provide the speed, accuracy, and flexibility to meet your particular needs.

  5. Multi-Link Robotic Systems Multi-Link robotic systems combine mature, proven technology with state of the art performance. These robots are mainstays in fabs throughout the industry.

  6. CONTACT US Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126 Fax: 510.324.0130 www.kensingtonlabs.com Our Toll Free Number 1-888-977-7800 Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com Service - Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com

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