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Scanning Electron Microscopy

Scanning Electron Microscopy. What is an SEM?. What is an SEM?. A Scanning Electron Microscope is an instrument that investigates the surfaces of solid samples by using a beam of electrons in a vacuum. What is an SEM?.

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Scanning Electron Microscopy

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  1. Scanning Electron Microscopy

  2. What is an SEM?

  3. What is an SEM? • A Scanning Electron Microscope is an instrument that investigates the surfaces of solid samples by using a beam of electrons in a vacuum.

  4. What is an SEM? • A Scanning Electron Microscope is an instrument that investigates the surfaces of solid samples by using a beam of electrons in a vacuum. • The image is generated by the secondary emissions from the sample.

  5. Advantages of using an SEMinstead of a light microscope

  6. Advantages of using an SEM instead of a light microscope • Imaging • high resolution (because of short wavelength) - >1.4nm

  7. Advantages of using an SEM instead of a light microscope • Imaging • high resolution (because of short wavelength) - >1.4nm • Secondary electron imaging for topology

  8. Advantages of using an SEM instead of a light microscope • Imaging • high resolution (because of short wavelength) - >1.4nm • Secondary electron imaging for topology • Backscatter electron imaging for chemistry

  9. Advantages of using an SEM instead of a light microscope • Imaging • high resolution (because of short wavelength) - >1.4nm • Secondary electron imaging for topology • Backscatter electron imaging for chemistry • High depth of field

  10. Advantages of using an SEM instead of a light microscope • Imaging • high resolution (because of short wavelength) - >1.4nm • Secondary electron imaging for topology • Backscatter electron imaging for chemistry • High depth of field • Elemental Analysis – EDXS (Energy-dispersive X-ray analysis)

  11. Advantages of using an SEM instead of a light microscope • Imaging • high resolution (because of short wavelength) - >1.4nm • Secondary electron imaging for topology • Backscatter electron imaging for chemistry • High depth of field • Elemental Analysis – EDXS (Energy-dispersive X-ray analysis) • Structural Analysis – EBSD (Electron Back-scatter Diffraction analysis)

  12. Advantages of using an SEM instead of a light microscope • Imaging • high resolution (because of short wavelength) - >1.4nm • Secondary electron imaging for topology • Backscatter electron imaging for chemistry • High depth of field • Elemental Analysis – EDXS (Energy-dispersive X-ray analysis) • Structural Analysis – EBSD (Electron Back-scatter Diffraction analysis) • Ease of sample preparation since most SEMs only require the sample to be conductive.

  13. Sample Constraints

  14. Sample Constraints • Must fit in chamber (!)

  15. Sample Constraints • Must fit in chamber • Must be compatible with vacuum (even for ESEM samples)

  16. Sample Constraints • Must fit in chamber • Must be compatible with vacuum (even for ESEM samples) • Must have conductive surface (not necessary for ESEM samples)

  17. JEOL 5910 General-Purpose SEM

  18. FEI XL30 FEG-ESEM

  19. JEOL 6320 High-resolution SEM

  20. Secondary Electron Images Give information about sample's topography

  21. BSE Images Give information about sample's chemistry

  22. EDS Spectra Give information about sample's composition

  23. X-Ray Maps Give information about elemental distribution in the sample SE Cu Pb Sn

  24. Electron beam strikes a crystalline material tilted at 70° Backscatter patterns composed of intersecting bands Indexable patterns

  25. Center for Materials Science and Engineering Electron Microscopy SEF Location: 13-1012 Normal Working Hours:8:30 am – 4:45 pm on M-F 24 hr accessible for evening/weekend users (not for undergraduates) Staff: Dr. Anthony (Tony) Garratt-Reed (TEM, SEM, STEM) Dr. Yong Zhang (TEM, SEM, STEM) Mr. Patrick Boisvert (SEM, Microtome)

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