'Poly si' presentation slideshows

Introduction to CMOS Technology

Introduction to CMOS Technology. C. Fenouillet-Beranger SOI Devices Engineer, CEA/LETI & STMicroelectronics, Crolles. Outline. MOSFET Basics Ideal MOSFET physics Main parameters : threshold, leakage and speed What MOSFET for what application ?

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High-Performance Schottky Barrier MOSFET

High-Performance Schottky Barrier MOSFET. Horng-Chih Lin Department of Electronics Engineering & Institute of Electronics National Chiao Tung University September 19, 2005. Outline. Background Low ? B Source Field-induced Drain (FID) Structure Non-Si Channel Materials

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Microstructured Vertically Aligned Carbon Nanotube Composites

Microstructured Vertically Aligned Carbon Nanotube Composites. Dr. Robert Davis & Group Brigham Young University Physics and Astronomy davis@byu.edu (presented by Prof. David Allred, BYU). Outline. Vertical aligned carbon nanotube (VACNT) growth Dense nanotube structures

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Alternative Substrates

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Deposition of Coatings by PECVD

Deposition of Coatings by PECVD. Jung-Hyun Park EE7730 Department of Electrical Engineering Auburn University Fall 2003. Review of CVD. Film deposition by initiating a chemical reaction inside a chamber filled with reagents vaporized in an inert carrier gas

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FinFET

FinFET. Qin Zhang EE 666 04/19/2005. Outline. Introduction Design Fabrication Performance Summary. Introduction. Double-gate FET (DGFET) can reduce Short Channel Effects (SCEs) Reduce Drain-Induced-Barrier-Lowering Improve Subthreshold Swing S.

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7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120. L m. Photoresist. Lm + 2t SiO2. Surface Micromachining. n +. Basic Process Sequence (poly-Si). Blanket n + diffusion of Si substrate (ground plane) Passivation layer (e.g. SiO 2 , Si 3 N 4 , LPCVD Si 3 N 4 on top of SiO 2 )

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7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120. L m. Photoresist. Lm + 2t SiO2. Surface Micromachining. n +. Basic Process Sequence (poly-Si). Blanket n + diffusion of Si substrate (ground plane) Passivation layer (e.g. SiO 2 , Si 3 N 4 , LPCVD Si 3 N 4 on top of SiO 2 )

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Surface Micromachining

Surface Micromachining. Dr. Marc Madou, Fall 2012, UCI Class 10. L m. Photoresist. Lm + 2t SiO2. Surface Micromachining. n +. Basic Process Sequence (poly-Si). Blanket n + diffusion of Si substrate (ground plane)

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7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120. L m. Photoresist. Lm + 2t SiO2. Surface Micromachining. n +. Basic Process Sequence (poly-Si). Blanket n + diffusion of Si substrate (ground plane) Passivation layer (e.g. SiO 2 , Si 3 N 4 , LPCVD Si 3 N 4 on top of SiO 2 )

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Lecture 18

Lecture 18. OUTLINE The MOS Capacitor (cont’d) Effect of oxide charges Poly-Si gate depletion effect V T adjustment Reading : Pierret 18.2-18.3; Hu 5.7-5.9. Oxide Charges. In real MOS devices, there is always some charge within the oxide and at the Si/oxide interface. Within the oxide:

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Lecture 18

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Lecture 18

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Lecture 18

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Lecture 18

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Fabrication of Poly-Si TFT on Flexible Thin Glass Substrate

Fabrication of Poly-Si TFT on Flexible Thin Glass Substrate. Yoochul Jung, Sunghwan Won, D.G. Ast (Cornell University, Dep. of Mat. Sci. Eng) 2006.06.28. Outline. Motivation Comparison of Polymer and Glass substrates. Processing of Pocket Fabrication

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Magnetic Nanofluidics ME342 Design Project Update 3

Magnetic Nanofluidics ME342 Design Project Update 3. Abhishek Dhanda Kwan-Kyu Park Michael Pihulic Katherine Tsai July 27, 2006. Equipment Training. Completed Katherine: STS2 Abhishek: Metallica Kwan-Kyu: P-5000 Pending WBGEN for gold liftoff Drytek 1 and 4 Super Users

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Application Book (1/2)

Application Book (1/2). Silicon dioxide : Thermal oxide, TEOS, PETEOS, SOG, BSG, BPSG, repeatability, stability, mapping, multi-layers. Nitride : SiNx, GAP measurement. ONO, OPO and ONOPO stacks : ONO, OPO, ONOPO, crystallinity of Poly-Si, rugged poly,mappings, repeatability.

199 views • 4 slides