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Status of pre-production at TESLA

Status of pre-production at TESLA. Václav Vrba Institute of Physics AS CR, Prague. Till the end of June Tesla shell provide 20 2-Tile and 20 3-Tile wafers;

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Status of pre-production at TESLA

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  1. Status of pre-production at TESLA Václav Vrba Institute of Physics AS CR, Prague Václav Vrba, Institute of Physics, AS CR

  2. Till the end of June Tesla shell provide 20 2-Tile and 20 3-Tile wafers; • More of 50% of this production was ready at the end of May, but but it appeared that for important part of wafers the “high”P-spray dose was missing (done just “low” dose have been done); • The clarification of the P-spray problem caused the delay in the preliminary announced delivery; • About 25% of the planned delivery was sent out on 5th June to the Sensor Labs  some organizational problems with the redistribution of wafers via CERN; • Because the wafers did not reach the Sensors Labs in time, I asked Tesla provide me their measurements to be presented on the Pixel week; • Due to several accumulated obstacles as: significant bigger lead time for wafers, the regular maintenance of double side aligner, etc. Tesla will probably ask for delay of end of June term. . Václav Vrba, Institute of Physics, AS CR

  3. Václav Vrba, Institute of Physics, AS CR

  4. Václav Vrba, Institute of Physics, AS CR

  5. Václav Vrba, Institute of Physics, AS CR

  6. Václav Vrba, Institute of Physics, AS CR

  7. Václav Vrba, Institute of Physics, AS CR

  8. Václav Vrba, Institute of Physics, AS CR

  9. Václav Vrba, Institute of Physics, AS CR

  10. Conclusions • TESLA finished 25% of second pre-production. The sensors conform with QA criteria on measurements performed by vendor. Václav Vrba, Institute of Physics, AS CR

  11. Václav Vrba, Institute of Physics, AS CR

  12. Václav Vrba, Institute of Physics, AS CR

  13. Václav Vrba, Institute of Physics, AS CR

  14. New aligner Handling spots Václav Vrba, Institute of Physics, AS CR

  15. Basic characteristics Ufd  80 V Václav Vrba, Institute of Physics, AS CR

  16. Basic characteristics (cont) Iox @ 50 V  100 pA Václav Vrba, Institute of Physics, AS CR

  17. Basic characteristics (cont) Significant improvement of leakage current ! 3-Tiles - New delivery Good Tiles - Old delivery Václav Vrba, Institute of Physics, AS CR

  18. Basic characteristics (cont) Diode with Guard ring P-spray doses Václav Vrba, Institute of Physics, AS CR

  19. Delivery According contract: 11 3-tile wafers 2 2-tile wafers 1 2-tile wafer (Prague, replacement of nonconform.) 1 2-tile wafer (NM, broken) Additionally available: 2 3-tile wafers 9 2-tile wafers Václav Vrba, Institute of Physics, AS CR

  20. Václav Vrba, Institute of Physics, AS CR

  21. Václav Vrba, Institute of Physics, AS CR

  22. Václav Vrba, Institute of Physics, AS CR

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