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Development of High-Performance Voltage and Current Sensors for Plasma Applications

This project focuses on creating reliable sensing equipment for measuring current and voltage in plasma environments exceeding 500V and 10MHz. Existing commercial probes do not meet both frequency and voltage specifications, leading to the need for high-impedance, homebrew solutions. The design leverages HFSS simulations to address parasitic issues and optimize performance, while also allowing for in-line sensor integration. Future work will examine enhancements, budgets, and potential for experiments in plasma stability and waveform analysis.

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Development of High-Performance Voltage and Current Sensors for Plasma Applications

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Presentation Transcript

  1. Plasma E- Measurement Brian DeHerrera John Purcell JaberAssiri

  2. Introduction • Purpose • Problems • HFSS Simulation • Current Design • Voltage Divider • Future Work & budget • Conclusion Outline

  3. Create reliable current and voltage sensing equipment to work in common plasma ranges • >500V • >10MHz • Create more reliable plasma for experiments • Control line impedance • Measure waveform being transmitted to plasma probe Purpose

  4. Plasma System

  5. No commercially available probes • Can meet some specifications, but not both frequency and desired voltage • Not trivial to create homebrew probe • Needs to be high impedance • Parasitic Problems

  6. Draw Model • Assign Boundary Conditions • Assign Excitation Ports (inputs) • Analyze • Generate Reports HFSS Simulation

  7. Draw Model

  8. Freq Response

  9. Modeled design off of AE’s Z-Scan Benefits: • Parasitic are minimized • Sensor can be added in-line with plasma system Concerns: • EMI design: both shielding outside noise and reducing leakage • Semi-complicated design • Need to machine parts Current Design: Coax

  10. Current Design: Coax

  11. Current Design: Coax

  12. Why a V-D? Voltage Divider

  13. Conditions: • R1+R2>= 2M Ohm & C1+C2<10p F Voltage Divider

  14. Conditions: • R1*C1=R2*C2 • If (R1*C1)> (R2* C2) Voltage Divider

  15. Conditions: • R1*C1=R2*C2 • If (R1*C1)<(R2* C2) Voltage Divider

  16. Conditions: • R1*C1=R2*C2 Voltage Divider

  17. From: • R1+R2>= 2M Ohm & C1+C2<10pF & • R1*C1=R2*C2 • Therefore: • R1= 10M ohm, R2= 100k ohm • C1= .1pF , C2= 10pF Voltage Divider

  18. Future Work

  19. Purposes & problems • HFSS Simulation • Current Design • Voltage Divider • Future Work & budget Conclusion

  20. Questions ?? Thank you

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