Design and simulation of a mems high g inertial impact sensor
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Design and Simulation of a MEMS High G Inertial Impact Sensor. Y.P. Wang1, R.Q. Hsu1, C.W. Wu2 1Department of Mechanical Engineering, National Chiao Tung University, 1001 Ta-Hsueh Road, 300 Hsinchu, Taiwan Phone: +886-3-5712121 Ext.31934, Email: anitawu.wlh@msa.hinet.net

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Design and simulation of a mems high g inertial impact sensor

Design and Simulation of a MEMSHigh G Inertial Impact Sensor

Y.P. Wang1, R.Q. Hsu1, C.W. Wu2

1Department of Mechanical Engineering, National Chiao Tung University,

1001 Ta-Hsueh Road, 300 Hsinchu, Taiwan

Phone: +886-3-5712121 Ext.31934, Email: anitawu.wlh@msa.hinet.net

2Department of Mechanical and Mechatronic Engineering, National Taiwan Ocean University

2, Pei-Ning Road, Keelung, Taiwan.

Speaker: Jing-Wen Shih


Outline
Outline

  • Introduction

  • The major goal of Inertial impact sensor

  • The micro impact sensor proposed in this study

  • Simulation

  • Conclusion

  • Reference


Introduction
Introduction

  • Inertial sensors have been extensively utilized in science like inertial navigation systems and airbag triggers .

  • For high G(>300G) applications. Reaction times for conventional mechanical type impact sensors are not fast enough.


The major goal of inertial impact sensor
The major goal of inertial impact sensor

  • Designing an impact sensor that has a faster reaction time than conventional sensors and a mechanism that is sufficiently robust to survive the impact when a vehicle collides with a hard target is the major goal of this study.


Conventional inertial impact sensor
Conventional inertial impact sensor

  • (a)cantilever beam type

  • (b)axial spring type


Mds system trigger
MDS System trigger

  • MDS: Mass- Damper- Spring Dynamic





To evaluate system reaction time 4 different arrangements of spring and proof mass were tested
To evaluate system reaction time, 4 different arrangements of spring and proof mass were tested.


The proof mass scale and coil number of the sensor
The proof mass scale and coil number of the sensor of spring and proof mass were tested.


Simulation
Simulation of spring and proof mass were tested.

  • Displacement versus applied forces for each sensor


The response time of the micro sensor
The response time of the micro-sensor of spring and proof mass were tested.


Design and simulation of a mems high g inertial impact sensor
P of spring and proof mass were tested. roof mass increases from 0.62 to 1.0, and thespring constant remains unchanged, the reaction time isdecreased.


Minimum g values for the sensors to be triggered
Minimum G values for the sensors to be triggered of spring and proof mass were tested.


Design and simulation of a mems high g inertial impact sensor
Reducing the spring constant, and retaining the proof mass, the reaction time decreased and the trigger G value decreased for sensors


Minimum g values for the sensors to be triggered1
Minimum G values for the sensors to be triggered the reaction time decreased and the trigger G value decreased for sensors


The plastic strain of the type 1 sensor in 21000g
The plastic strain of the type 1 sensor in 21000G the reaction time decreased and the trigger G value decreased for sensors

  • With no significant interference in the x and z axis; consequently,sensor stability is very good.


Conclusion
Conclusion the reaction time decreased and the trigger G value decreased for sensors

  • This proposed impact sensor is intended for use at 8,000–21,000G. Four different designs were analyzed.

  • The impact sensors were sufficiently robust to survive the impact of at least 21,000G, four times higher than that of conventional inertial

    impact sensors.


References
References the reaction time decreased and the trigger G value decreased for sensors

  • F. Goodeough, Airbag boom when IC accelerometer sees 50 G,Electronics Design, pp.45-56, August. 8, 1991.

  • Tadao Matsunaga, Masayoshi Esashi, Acceleration switch with extended holding time using squeeze film effect for side airbag systems, Sensors and Actuators A:physical, vol. 100, Issue 1, pp.10-17 , August. 2002.

  • Military Standard, Mechanical Shock Test, MIL-STD-883E Method 2002.4, US Dept. of Defense, 2004.

  • Donald R. Ask eland, The science and engineering of materials, 1st edn,Taipei, Kai Fa, 1985, ch. 6, pp. 126-127.

  • Trimmer, W.S.N, Microrobots and Micromechanical Systems, Sensors and Actuators vol.19 no.3, pp. 267-287, 1989.

  • M. Elwenspoek, R. Wiegerink, Mechanical Microsensors, Germany,Springer, 2001.

  • Tai-Ran Hsu, MEMS & Microsystems Design and Manufacture,international edition 2002, Singapore, McGraw-Hill, pp. 157-159.


Design and simulation of a mems high g inertial impact sensor