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Design and test RS232 communication to the controller. Design and test website using Mac mini as a web server. Browser. Webserver. Sends parameters to webserver Sends commands to controller Sets up furnace Responds to controller Sends feedback to webserver
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communication to the
Design and test
as a web server
Sends parameters to webserver
Sends commands to controller
Sets up furnace
Responds to controller
Sends feedback to webserver
Updates data on browser
The Microelectronics Research Center has a diffusion furnace that is used as part of the EE 432/532 courses titled “Microelectronics Fabrication Techniques”. However, the temperature controllers of this furnace were quite outdated and still used analog technology to be operated. Our senior design team upgraded the furnace by implementing new temperature controllers, providing hardware as well as a software interface so that the temperature of the furnaces can be controlled and monitored remotely. The end product will be an upgraded furnace which has a digital temperature controller which is accurate to within +/- 1° Celsius. This controller will be able to communicate with a dedicated computer, which in turn is connected to a dedicated server. We need this controller to be able to control three separate zones within each oven chamber, thus it must have at least 3 thermocouple inputs.
Resources and Schedule
Table 1 – Projected Project Costs
Figure 4 – Project Gantt Chart
Figure 3 – System overview
Figure 1 – SCR Interfacing Circuit
Get detailed specifications from customer.
Test prototype and
make necessary changes
Figure 5 – Hardware block diagram
Test the revised circuit
Implement both Hardware and Software
Test and verify proper functionality and tune
Figure 2 – Website used to setup furnace
SD Dec 11-14
Team MembersClient / Advisor Acknowledgements
Victor VillagomezCprE Joe Grady E E Dr. Gary Tuttle Leland Harker
Prakalp Sudhakar E E James Crow E E Robert Mayer
Hongyu Chen S E