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Advisor ： Cheng-Hsien Liu Reporter : Ming-Yen Chen Date ： 2008/6/11

DIGITALLY-TUNABLE MEMS FILTER USING MECHANICALLY-COUPLED RESONATOR ARRAY Hengky Chandrahalim and Sunil A. Bhave OxideMEMS Lab, Electrical and Computer Engineering, Cornell University, Ithaca, New York, USA. Advisor ： Cheng-Hsien Liu Reporter : Ming-Yen Chen Date ： 2008/6/11. Outline.

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Advisor ： Cheng-Hsien Liu Reporter : Ming-Yen Chen Date ： 2008/6/11

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  1. DIGITALLY-TUNABLE MEMS FILTER USING MECHANICALLY-COUPLEDRESONATOR ARRAYHengky Chandrahalim and Sunil A. BhaveOxideMEMS Lab, Electrical and Computer Engineering, Cornell University, Ithaca, New York, USA Advisor：Cheng-HsienLiu Reporter : Ming-Yen Chen Date ：2008/6/11

  2. Outline • Abstract • Introduction • Background • Experimental setup • Experimental results • Conclusion

  3. Abstract • Digital tuning • Resonator array • Band-select filter

  4. Introduction-1 • Why band-select filter？ Hz

  5. Introduction-2 • Extensional mode resonator

  6. Background-1 • S.A. Bhave, and R.T. Howe, “Silicon nitride-on-silicon bar resonator using internal electrostatic transduction,” Transducers’05, Seoul, Korea, June 5-9, 2005, pp. 2139-2142. Poly electrode 100nm SiN 3um SOI

  7. Background-2 • f = (n/2L) (E/ρ)^1/2 E：effective elastic modulus for 2D expansion ρ: density of the resonator respectively n：harmonic order Center frequency : 511 MHz

  8. Experimental setup • DC1=DC4=+Vp, DC2=DC3=OFF • DC1=DC3=+Vp, DC2=DC4=-Vp • DC1=DC2=DC3=DC4=+Vp

  9. Experimental results-1 1. DC1=DC4=50V, DC2=DC3=OFF 4-port filter

  10. Experimental results-2 2. DC1=DC3=40V, DC2=DC4= -40V resonator 1 and 2 :Out of plane Lower sub-band filter

  11. Experimental results-3 3. DC1=DC2=DC3=DC4= 40V resonator 1 and 2 : in plane higher sub-band filter

  12. Experimental results-4

  13. Conclusion • Digital tuning at 509 MHz with 1.4 MHz bandwidth and with sub-bands 700 kHz wide. • More resonators will provide finer sub-bands.

  14. Thanks for Your Attention!

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