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EasyGem ™2.4 Technology Summary for SECS Communication. Easy, Fast and Reliable Equipment FA Control Solution. Introduction. HOST. EasyGem is based on Easycluster CTC. It supports control and status information between Host and Equipment
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EasyGem™2.4Technology Summary for SECS Communication Easy, Fast and Reliable Equipment FA Control Solution
Introduction HOST • EasyGem is based on Easycluster CTC. It supports control and status information between Host and Equipment • EasyGem supports SECS II Protocol, GEM Standards and HSMS Communication • EasyGem has proven reliability and flexibility through multiple OEM installs in different FAB environments. FAB Network GEM CTC PMC PMC I/F PMC PMC Machine TMC Intra-tool Network Easycluster
Advantages • Easy to build : Defined using Configuration File or GUI • Easy to extend : GEM Definition options to change functionality. ( ex : 200mm <-> 300mm, Increased Modules ) • Easy to debug : Comprehensive history and communication data logfiles ( Host<->Gem, Gem<->Equip, Error, Debug Message file ) • High Reliability and Flexibility : Multiple OEM installs in varied End User facilities
Features • 200mm/300mm FA Scenario Support : 200mm -> Gem Scenario, 300mm -> Gem and Control/Process Job Scenario • Full Gem Scenario Support : Up to Spooling, Trace, Variable Limit Set/Monitor, Material Movement • Max 64 Process Module Support : PPID, CEID • User ID Definition : Maximum 3000 : ID => SVID,CEID,ECID,RCMD,ALID • TEPAS Support : TEPAS( Samsung : Total Equipment Prediction Analysis System ) 1 TraceID has maximum 200 SVIDs, minimum 1sec sampling time and maximum 21 hundred million counts. At the same time 10 TraceID is supported • Variable and Flexible Option : User can configure Option as Fab Request and Equipment System,
User Configuration Files • ALID.cfg : Alarm ID Registry File( link with Equipment Alarm Number ) • CEID.cfg : Collection Event ID Registry File( includes Kornic Provision Event ) • ECID.cfg : Equipment Constant ID Registry File( link with Equipment Parameter IO ) • SVID.cfg : Status Variable ID Registry File( link with Equipment Status IO ) • RCMD.cfg : Remote Command Registry File( includes Kornic Default Command ) • Recipe.cfg : Process Program ID Registry File( link with Process Module Recipe Item ) • System.cfg : EasyGem Option Configuration File
Debugging Files • SECS Message Log File : All messages between Host and Equip. are saved. File is created at 1 hour intervals • Report/Event ID Log File : Can show ReportID/Event from host in GUI. The information remains persistent, no need to reload • Equipment Execution Log File : Command and Event messages between Gem and Equipment • Gem Analysis Error Log File : If message from host has an error( syntax, format, reject situation ), the analysis error message is saved. • Communication History and Error Log File : Ethernet Port Open Fail and Host Communication Start/End Time
Architecture Configuration System CEID RCMD SVID PP Body ALID Log File Log File SECS2 Message Comm Debug Easycluster Analysis Debug Event Log PMC / TMC Spooling Data Easycluster IO Manager Application1 Alarm Manager Application2 EasyGem Event . . . . Communication Task Format CTC Execution Analysis Application1 Data gathering Unformat Application2 GUI GUI Alarm Manager IO Manager Host SECS2 Format UnFormat Task H/W
System Requirements • Control System • Pentium III or Higher, min. 128 MB RAM • Monitor : SVGA (1,024 768) • LAN Card • OS : Window NT 4.0 Workstation, Windows 2000, Windows XP • FA Pre-test Tool : SECSim Pro™ (GW Associates, Ver2.0)
Generic Equipment Model(GEM) • State Models : Process, Communication, Alarm, Control, Material Movement, Spooling • Establish Communications : Communication State Display in GUI, Timer Constants, Comm. Enable/Disable • Data Collection : Collection Event, Host Defined Event Reports, Event Enable/Disable, Status Data Collection, Trace Data Collection, Host Limit monitoring, Variable Name list Req. • Alarm Management : Set Alarm Enable/Disable/Auto/Semi, Alarm Reporting, Alarm Data Request • Remote Control : Control Event, Control Status Variable, State Display, Appropriately Accept/Deny • Equipment Constants : Non-Volatile Storage, Host Data Req. and New Data Set, EC Name List Request
Generic Equipment Model(GEM) • Process Program Management : Host Upload/Download/Delete/Directory request, Process Program Verification • Material Movement : Port/Wafer Status, Completion Time • Equipment Terminal Services : Single/Multi Block, Message Display in GUI • Error Messages : Unrecognized Device ID/Stream/Function, illegal Data, Transaction Timeout • Clock : Equipment Clock Request/Set • Spooling : Non-Volatile Storage, Spool Status and Display
Supported SEMI Standards • SEMI E5-0301SEMI Equipment Communications Standard 2 Message Content (SECS-II) • SEMI E30-1000Generic Model for Communications and Control of Manufacturing Equipment (GEM) • SEMI E37-0298High-Speed SECS Message Services (HSMS) Generic Services • SEMI E37.1-96EHigh-Speed SECS Message Services Single – Session Mode (HSMS-SS) • SEMI E39-0600Object Services Standard : Concepts, Behavior, and Services (OSS) • SEMI E40-0301Standard for Processing Management (PJM) • SEMI E42-0299ERecipe Management Standard: Concepts, Behavior, and Service(RMS) • SEMI E84-0301Specification for Enhanced Carrier Handoff Parallel I/O Interface(PIO) • SEMI E87-0301Provisional Specification for Carrier Management (CMS) • SEMI E90-0301Specification for Substrate Tracking(STS) • SEMI E94-1000Provisional Specification for Control Job Management(CJM) • SEMI E99-1000EThe Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services
Semi Standard Compliance GEM COMPLIANCE STATEMENT Fundamental GEM Requirements GEM Section Implemented GEM-Compliant State Models 3.0, 3.1, 3.3 Yes No Yes (See NOTE 1) No Equipment Processing States 3.4 Yes No Host-Initiated S1=F13/F14 Scenario 4.1.5.1 Yes No Event Notification 4.2.1.1 Yes No On-Line Identification 4.2.6 Yes No Error Message 4.9 Yes No Documentation 8.4 Yes No Control ( Operation Initiated) 4.12(except 4.12.5.2) Yes No Additional Capabilities Implemented GEM-Compliant (See NOTE 2) Establish Communications 4.1, 3.2 Yes No Yes No Dynamic Event Report Configuration 4.2.1.2 Yes No Yes No Variable Data Collection 4.2.2 Yes No Yes No Trace Data Collection 4.2.3 Yes No Yes No Status Data Collection 4.2.5 Yes No Yes No Alarm Management 4.3 Yes No Yes No Remote Control 4.4 Yes No Yes No Equipment Constants 4.5 Yes No Yes No Process Program Management 4.6 Yes No Yes No Material Movement 4.7 Yes No Yes No Equipment Terminal Services 4.8 Yes No Yes No Clock 4.10 Yes No Yes No Limits Monitoring 4.2.4 Yes No Yes No Spooling 4.11 Yes No Yes No Control (Host-Initiated) 4.12.5.1 Yes No Yes No ( E5-0301/SEMI E30-1000/SEMI E39-0600 )
Semi Standard Compliance PM COMPLIANCE STATEMENT Fundamental PM Requirements PM Section Implemented PM Compliant Single Process Job Execution 8.2 Yes No Yes No Process Job Milestones 8.2.1 (except 8.2.1.2, 3) Yes No Yes No Process Job Failure Indication 8.2.1.7 Yes No Yes No Abort Command 8.2.3.2 Yes No Yes No Process Job Object Implementation 8.3, 9 Yes No Yes No Reject Invalid/Incomplete Parameter 8.2.1.2.1 Yes No Yes No Reject Unsupported Capabilities 11.2 Yes No Yes No Services Implementation (not per Additional) 10 Yes No Yes No Resource Pre/Post-conditioning Yes No Yes No Stop, Pause and Resume Commands 8.2.3.3, 4, 5 Yes No Yes No Manual Process Start 8.2.3.9 Yes No Yes No Process Job Queuing 8.3 Yes No Yes No Process Tuning 7.5, 10.4.9 Yes No Yes No Processing of Material Groups 7.6 Yes No Yes No Multiple Concurrent Process Jobs 7.7 Yes No Yes No Multiple Consecutive Process Jobs 7.8 Yes No Yes No Process Job With No Material 7.9 Yes No Yes No Event Notification 8.2.2 Yes No Yes No Enhanced Job Creation 10.4.2 Yes No Yes No Multiple Job Creation 10.4.3 Yes No Yes No Duplicate Job Creation 10.4.4 Yes No Yes No ( E40-0301 )
Semi Standard Compliance CMS COMPLIANCE STATEMENT Fundamental CMS Requirements CMS Section Implemented CMS Compliant Load Port Number 9.1 ■Yes No ■Yes No Carrier Slot Number 9.2 ■Yes No ■Yes No Load Port Transfer State Model 9.3 – 9.4.3 ■Yes No ■Yes No Carrier Object Implementation 10 ■Yes No ■Yes No Load Port Reservation State Model (internal buffer equipment) 12 Yes ■No Yes ■No Load Port/Carrier Association State Model 13 ■Yes No ■Yes No Carrier ID Verification Support 14.2 ■Yes No ■Yes No Slot Map Verification Support 14.3 ■Yes No ■Yes No Services Implementation 16 ■Yes No Yes ■No Additional Events Implementation 18 ■Yes No Yes ■No Variable Data Definitions 19 ■Yes No Yes ■No Alarms Implementation 20 ■Yes No Yes ■No Additional CMS Capabilities CMS Section Implemented CMS Compliant Load Port Reservation State Model (fixed buffer equipment) 12 ■Yes No ■Yes No Reservation Visible Signal 12.2 ■Yes No ■Yes No ( E87-0301)
Semi Standard Compliance STS COMPLIANCE STATEMENT Fundamental STS Requirements STS Section Implemented STS Compliant Substrate Tracking 8 (except 8.4) ■Yes No ■Yes No Substrate Object and State Model 9 ■Yes No ■Yes No Substrate Location Object and State Model 10 ■Yes No ■Yes No Service Message Implementation 11 ■Yes No ■Yes No Variable Data 12 ■Yes No ■Yes No Events 8.4 ■Yes No ■Yes No Fundamental STS Requirements STS Section Implemented STS Compliant none ( E90-0301)
Semi Standard Compliance CJM COMPLIANCE STATEMENT Fundamental CJM Requirements CJM Section Implemented CJM Compliant Control Job Object 8 ■Yes No ■Yes No Control Job State Model 9 ■Yes No ■Yes No Control Job Queue Model 10 ■Yes No ■Yes No Carrier Properties 11 ■Yes No ■Yes No Service Message Implementation 12 ■Yes No ■Yes No Variable Data 13 ■Yes No Yes ■No Events 7.3.2 ■Yes No ■Yes No Additional Requirements 14 ■Yes No Yes ■No ( E94-1000 )
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