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EasyGem ™2.4 Technology Summary for SECS Communication. Easy, Fast and Reliable Equipment FA Control Solution. Introduction. HOST. EasyGem is based on Easycluster CTC. It supports control and status information between Host and Equipment

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easygem 2 4 technology summary for secs communication

EasyGem™2.4Technology Summary for SECS Communication

Easy, Fast and Reliable Equipment FA Control Solution

introduction
Introduction

HOST

  • EasyGem is based on Easycluster CTC. It supports control and status information between Host and Equipment
  • EasyGem supports SECS II Protocol, GEM Standards and HSMS Communication
  • EasyGem has proven reliability and flexibility through multiple OEM installs in different FAB environments.

FAB Network

GEM

CTC

PMC

PMC

I/F

PMC

PMC

Machine

TMC

Intra-tool Network

Easycluster

advantages
Advantages
  • Easy to build

: Defined using Configuration File or GUI

  • Easy to extend

: GEM Definition options to change functionality. ( ex : 200mm <-> 300mm, Increased Modules )

  • Easy to debug

: Comprehensive history and communication data logfiles

( Host<->Gem, Gem<->Equip, Error, Debug Message file )

  • High Reliability and Flexibility

: Multiple OEM installs in varied End User facilities

features
Features
  • 200mm/300mm FA Scenario Support

: 200mm -> Gem Scenario, 300mm -> Gem and Control/Process Job Scenario

  • Full Gem Scenario Support

: Up to Spooling, Trace, Variable Limit Set/Monitor, Material Movement

  • Max 64 Process Module Support

: PPID, CEID

  • User ID Definition : Maximum 3000

: ID => SVID,CEID,ECID,RCMD,ALID

  • TEPAS Support

: TEPAS( Samsung : Total Equipment Prediction Analysis System )

1 TraceID has maximum 200 SVIDs, minimum 1sec sampling time and maximum 21 hundred million counts. At the same time 10 TraceID is supported

  • Variable and Flexible Option

: User can configure Option as Fab Request and Equipment System,

user configuration files
User Configuration Files
  • ALID.cfg

: Alarm ID Registry File( link with Equipment Alarm Number )

  • CEID.cfg

: Collection Event ID Registry File( includes Kornic Provision Event )

  • ECID.cfg

: Equipment Constant ID Registry File( link with Equipment Parameter IO )

  • SVID.cfg

: Status Variable ID Registry File( link with Equipment Status IO )

  • RCMD.cfg

: Remote Command Registry File( includes Kornic Default Command )

  • Recipe.cfg

: Process Program ID Registry File( link with Process Module Recipe Item )

  • System.cfg

: EasyGem Option Configuration File

debugging files
Debugging Files
  • SECS Message Log File

: All messages between Host and Equip. are saved. File is created at 1 hour intervals

  • Report/Event ID Log File

: Can show ReportID/Event from host in GUI.

The information remains persistent, no need to reload

  • Equipment Execution Log File

: Command and Event messages between Gem and Equipment

  • Gem Analysis Error Log File

: If message from host has an error( syntax, format, reject situation ),

the analysis error message is saved.

  • Communication History and Error Log File

: Ethernet Port Open Fail and Host Communication Start/End Time

architecture
Architecture

Configuration

System

CEID

RCMD

SVID

PP Body

ALID

Log File

Log File

SECS2

Message

Comm

Debug

Easycluster

Analysis

Debug

Event

Log

PMC / TMC

Spooling

Data

Easycluster

IO Manager

Application1

Alarm Manager

Application2

EasyGem

Event

.

.

.

.

Communication

Task

Format

CTC

Execution

Analysis

Application1

Data

gathering

Unformat

Application2

GUI

GUI

Alarm Manager

IO Manager

Host

SECS2 Format

UnFormat Task

H/W

system requirements
System Requirements
  • Control System
    • Pentium III or Higher, min. 128 MB RAM
    • Monitor : SVGA (1,024 768)
    • LAN Card
  • OS

: Window NT 4.0 Workstation, Windows 2000, Windows XP

  • FA Pre-test Tool

: SECSim Pro™ (GW Associates, Ver2.0)

generic equipment model gem
Generic Equipment Model(GEM)
  • State Models

: Process, Communication, Alarm, Control, Material Movement, Spooling

  • Establish Communications

: Communication State Display in GUI, Timer Constants, Comm. Enable/Disable

  • Data Collection

: Collection Event, Host Defined Event Reports, Event Enable/Disable, Status Data Collection, Trace Data Collection, Host Limit monitoring, Variable Name list Req.

  • Alarm Management

: Set Alarm Enable/Disable/Auto/Semi, Alarm Reporting, Alarm Data Request

  • Remote Control

: Control Event, Control Status Variable, State Display, Appropriately Accept/Deny

  • Equipment Constants

: Non-Volatile Storage, Host Data Req. and New Data Set, EC Name List Request

generic equipment model gem10
Generic Equipment Model(GEM)
  • Process Program Management

: Host Upload/Download/Delete/Directory request, Process Program Verification

  • Material Movement

: Port/Wafer Status, Completion Time

  • Equipment Terminal Services

: Single/Multi Block, Message Display in GUI

  • Error Messages

: Unrecognized Device ID/Stream/Function, illegal Data, Transaction Timeout

  • Clock

: Equipment Clock Request/Set

  • Spooling

: Non-Volatile Storage, Spool Status and Display

supported semi standards
Supported SEMI Standards
  • SEMI E5-0301SEMI Equipment Communications Standard 2 Message Content (SECS-II)
  • SEMI E30-1000Generic Model for Communications and Control of Manufacturing Equipment (GEM)
  • SEMI E37-0298High-Speed SECS Message Services (HSMS) Generic Services
  • SEMI E37.1-96EHigh-Speed SECS Message Services Single – Session Mode (HSMS-SS)
  • SEMI E39-0600Object Services Standard : Concepts, Behavior, and Services (OSS)
  • SEMI E40-0301Standard for Processing Management (PJM)
  • SEMI E42-0299ERecipe Management Standard: Concepts, Behavior, and Service(RMS)
  • SEMI E84-0301Specification for Enhanced Carrier Handoff Parallel I/O Interface(PIO)
  • SEMI E87-0301Provisional Specification for Carrier Management (CMS)
  • SEMI E90-0301Specification for Substrate Tracking(STS)
  • SEMI E94-1000Provisional Specification for Control Job Management(CJM)
  • SEMI E99-1000EThe Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services
semi standard compliance
Semi Standard Compliance

GEM COMPLIANCE STATEMENT

Fundamental GEM Requirements

GEM Section

Implemented

GEM-Compliant

State Models

3.0, 3.1, 3.3

Yes No

Yes

(See NOTE 1)

No

Equipment Processing States

3.4

Yes No

Host-Initiated S1=F13/F14 Scenario

4.1.5.1

Yes No

Event Notification

4.2.1.1

Yes No

On-Line Identification

4.2.6

Yes No

Error Message

4.9

Yes No

Documentation

8.4

Yes No

Control ( Operation Initiated)

4.12(except 4.12.5.2)

Yes No

Additional Capabilities

Implemented

GEM-Compliant

(See NOTE 2)

Establish Communications

4.1, 3.2

Yes No

Yes No

Dynamic Event Report Configuration

4.2.1.2

Yes No

Yes No

Variable Data Collection

4.2.2

Yes No

Yes No

Trace Data Collection

4.2.3

Yes No

Yes No

Status Data Collection

4.2.5

Yes No

Yes No

Alarm Management

4.3

Yes No

Yes No

Remote Control

4.4

Yes No

Yes No

Equipment Constants

4.5

Yes No

Yes No

Process Program Management

4.6

Yes No

Yes No

Material Movement

4.7

Yes No

Yes No

Equipment Terminal Services

4.8

Yes No

Yes No

Clock

4.10

Yes No

Yes No

Limits Monitoring

4.2.4

Yes No

Yes No

Spooling

4.11

Yes No

Yes No

Control (Host-Initiated)

4.12.5.1

Yes No

Yes No

( E5-0301/SEMI E30-1000/SEMI E39-0600 )

semi standard compliance14
Semi Standard Compliance

PM COMPLIANCE STATEMENT

Fundamental PM Requirements

PM Section

Implemented

PM Compliant

Single Process Job Execution

8.2

 Yes No

Yes No

Process Job Milestones

8.2.1 (except 8.2.1.2, 3)

Yes No

Yes No

Process Job Failure Indication

8.2.1.7

Yes No

Yes No

Abort Command

8.2.3.2

Yes No

Yes No

Process Job Object Implementation

8.3, 9

Yes No

Yes No

Reject Invalid/Incomplete Parameter

8.2.1.2.1

Yes No

Yes No

Reject Unsupported Capabilities

11.2

Yes No

Yes No

Services Implementation (not per Additional)

10

Yes No

Yes  No

Resource Pre/Post-conditioning

Yes No

Yes No

Stop, Pause and Resume Commands

8.2.3.3, 4, 5

Yes No

Yes No

Manual Process Start

8.2.3.9

Yes No

Yes No

Process Job Queuing

8.3

Yes No

Yes No

Process Tuning

7.5, 10.4.9

Yes No

Yes No

Processing of Material Groups

7.6

Yes No

Yes No

Multiple Concurrent Process Jobs

7.7

Yes  No

Yes No

Multiple Consecutive Process Jobs

7.8

Yes No

Yes No

Process Job With No Material

7.9

Yes  No

Yes No

Event Notification

8.2.2

Yes No

Yes No

Enhanced Job Creation

10.4.2

Yes No

Yes No

Multiple Job Creation

10.4.3

Yes No

Yes No

Duplicate Job Creation

10.4.4

Yes No

Yes No

( E40-0301 )

semi standard compliance15
Semi Standard Compliance

CMS COMPLIANCE STATEMENT

Fundamental CMS Requirements

CMS Section

Implemented

CMS Compliant

Load Port Number

9.1

■Yes No

■Yes No

Carrier Slot Number

9.2

■Yes No

■Yes No

Load Port Transfer State Model

9.3 – 9.4.3

■Yes No

■Yes No

Carrier Object Implementation

10

■Yes No

■Yes No

Load Port Reservation State Model (internal buffer equipment)

12

Yes ■No

Yes ■No

Load Port/Carrier Association State Model

13

■Yes No

■Yes No

Carrier ID Verification Support

14.2

■Yes No

■Yes No

Slot Map Verification Support

14.3

■Yes No

■Yes No

Services Implementation

16

■Yes No

Yes ■No

Additional Events Implementation

18

■Yes No

Yes ■No

Variable Data Definitions

19

■Yes No

Yes ■No

Alarms Implementation

20

■Yes No

Yes ■No

Additional CMS Capabilities

CMS Section

Implemented

CMS Compliant

Load Port Reservation State Model (fixed buffer equipment)

12

■Yes No

■Yes No

Reservation Visible Signal

12.2

■Yes No

■Yes No

( E87-0301)

semi standard compliance16
Semi Standard Compliance

STS COMPLIANCE STATEMENT

Fundamental STS Requirements

STS Section

Implemented

STS Compliant

Substrate Tracking

8 (except 8.4)

■Yes No

■Yes No

Substrate Object and State Model

9

■Yes No

■Yes No

Substrate Location Object and State Model

10

■Yes No

■Yes No

Service Message Implementation

11

■Yes No

■Yes No

Variable Data

12

■Yes No

■Yes No

Events

8.4

■Yes No

■Yes No

Fundamental STS Requirements

STS Section

Implemented

STS Compliant

none

( E90-0301)

semi standard compliance17
Semi Standard Compliance

CJM COMPLIANCE STATEMENT

Fundamental CJM Requirements

CJM Section

Implemented

CJM Compliant

Control Job Object

8

■Yes No

■Yes No

Control Job State Model

9

■Yes No

■Yes No

Control Job Queue Model

10

■Yes No

■Yes No

Carrier Properties

11

■Yes No

■Yes No

Service Message Implementation

12

■Yes No

■Yes No

Variable Data

13

■Yes No

Yes ■No

Events

7.3.2

■Yes No

■Yes No

Additional Requirements

14

■Yes No

Yes ■No

( E94-1000 )

related screens
Related Screens

( Gem Communication)

related screens19
Related Screens

( Gem Configuration)

related screens20
Related Screens

( Host Communication)

related screens21
Related Screens

( Job Manager)