TEM only checked a small part of samples, i.e. a poor sampling instrument. (?interdiscipline cooperation). Which type information can be obtained from a TEM. . Microstructure Characterization of Epitaxial Grown Thin Film. . . . The epitaxial growth relationship can be identified according to HRTEM and SAED results, and the misfit parameter can be calculated as 3.47% between the epitaxial grown LaFeO3 thin film and LaAlO3 substrate..