MEMS Cell Adhesion Device. Andrea Ho Mark Locascio Owen Loh Lapo Mori December 1, 2006. PDMS Membrane. PLA. Top Electrode. PVDF (Piezoelectric). Bottom Electrodes. PDMS. Via. SiO 2. Ni Traces (Layer 2). Parylene. Ni Traces (Layer 1). Si. Summary of Fabrication.
Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author.While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server.
MEMS Cell Adhesion Device
December 1, 2006
Ni Traces (Layer 2)
Ni Traces (Layer 1)
[Roure, et al. PNAS 2005]
It is reasonable to assume constant sz over the piezoelectric material.
Resolution where system noise is the limiting factor
Resolution affected by fabrication processes
Diameter varies by ~10nm → Output voltage varies ~mV
ΔV = (30mV/μm)(0.06 μm) = 1.8 mV