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4 Operation, mechanisms and applications

MEMS MOEMS Nano. Workshop. 4 Operation, mechanisms and applications. Ken Gilleo PhD ET-Trends LLC. Motion (actuators). POWER. Actuators (“motors”) Electrical ( input ) Thermal (usually from electrical) Photonic (for MOEMS, OE) Sensors ( output ); usually electrical signals

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4 Operation, mechanisms and applications

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  1. MEMS MOEMS Nano Workshop 4 Operation, mechanisms and applications • Ken Gilleo PhD • ET-Trends LLC

  2. Motion (actuators) POWER • Actuators (“motors”) • Electrical(input) • Thermal (usually from electrical) • Photonic (for MOEMS, OE) • Sensors (output); usually electrical signals • Capacitance • Piezoresistive • Resonant beam • Electron tunneling • Photonic • Chemical • Biological/biochemical Change/output is caused by mechanical motion/force TYPES

  3. Actuator Classes • Electrostatic/capacitive • Linear comb drive • Rotary comb drive • Horizontal parallel plates • Electromagnetic • Linear • Rotary • Integrated coils or external field • Permanent or soft magnetic films • Thermal • Bimorph: dissimilar materials • Shape memory alloys • Pneumatic/hydraulic • Mechanical conversions/translations

  4. MEMS Engines * • Electrostatic; very efficient • Thermal; easy to implement • Electromagnetic, smaller • Pneumatic • Hydraulic • Photoelectric (energy through fiber) *Surface area is relatively high, mass is very low; surface effects are important

  5. Charged Charged ES Unit shuttle Anchor point Electrostatic (ES)

  6. Thermal Engines (T) • Expansion • Material, external; inkjet • Bimorph beam - bending • High force, moderate displacement • Frequency limited by conductivity

  7. Bimorph Beam (Thermal) off Resistive heater Low CTE on High CTE

  8. Electromagnetic U of Wisconsin CalTech

  9. DebiotechSTMicroelectronics insulin pump Thermal Inkjet Bellows: Air Pump MEMS Pumps • Actuation Mechanisms • Electrostatic • Thermal • Magnetic • Pneumatic • Piezoelectric • Ultrasonic • Direct Fluidic Actuation • Fluidic phase change • Electrohydrodynamic (EOF, electrophoresis, etc) • Direct fluidic actuation mechanisms

  10. Sensors – the #1 Class Popular for Accelerometers, mics, more • Capacitance • Piezoresistive • Resonant beam • Electron tunneling • Photonic • Chemical • Biological/biochemical Many principles

  11. ADI JPL Inertial Sensors (motion) • Accelerometers • Capacitor • Resonant • Multiple axis • Gyroscopes ADI

  12. Accelerometer/Gyros • Automotive • Sensing: crash, torque, vibration (well-being) • Navigation; GPS back-up • Active suspension • Consumer • Input device; computer, games, phones • Sports training, medical therapeutic • Alarms; burglar, seismic (earthquake) • Stabilization, camera • Military • Ordnance; guidance, condition, attack warning • Operator input/control • Aiming; gun, camera (stabilization) • Industrial • Sensing: vibration, tilt, direction, rate • Stabilization • Monitoring • Robotics; position, contact, feedback, etc. ADI

  13. Now owned by ADI INERTIAL Dual-Axis Gyroscope Resonant Accelerometers 3-Axis Accelerometer Z-Axis Gyroscope

  14. ABS/Antiskid Airbag Deployment Anti-Rollover Detection Battery Disconnect Crash Alerting Dynamic Suspension Dynamic Ride Control Dynamic Cruise Control Electronic Park Brake Fleet Monitoring Fuel Shutoff Headlight Leveling Inertial Navigation – backup Misfire Detection Security/Antitheft Seatbelt Tensioning Stability Systems Tilt Sensing Tire Motion Tire Pressure Transmission Monitor Vehicle Performance Active Subwoofers Ambulatory Training Appliances Binoculars Blood Pressure Monitor Camcorders Stabilizer Digital Pens Digital Cameras Stabilizer Disk Drive Monitoring Game Controllers Handheld GPS Head Tracking Inertial Navigation Laptop Anti-Theft Laptop Drop Detection Joysticks Mouse - 3D Out-of-Balance Medical Devices Sleep Monitor Pedometers Sports Training – golf Sports Training – fly cast Sports Training – batting Tilt Sensing Virtual Reality I/O Wearable Computing I/O Accelerometer Applications Automotive Consumer Industrial/Scientific/Military • Antenna Alignment • Antenna Switches • Construction Leveling • Machine • Health Equipment • Tilt Sensing • Fork Lift Positioning • Marine Navigation • Platform Leveling • Seat Damping • Seismic • Gas Shutoff • Satellite Dish Alignment • Satellite Gyroscopes • Ship mechanical monitoring • Shock Sensing • UAVs • UMVs • Vibration Monitoring

  15. Injector Pressure Sensor Fuel Pressure Sensor Automotive Pressure Sensors • Pressure Sensors • Fuel • Tire • Manifold • Injector • AC • Mass air • Break • Fuel vapor • Oil AC Pressure Sensor

  16. Thin diaphragm Internal ref. pressure Vacuum Resonating beam (F1) Resonating beam is now under tension; (F2) Transducer Pressure Sensors • Transducers • Piezoresistor • Capacitor • Resonant beam

  17. Reactive surface adsorbs gases i Heater Chem-sensor gate; adsorbing metal like Pd Adsorption lowers threshold voltage since a dipole is induced. Vs Vd Chem-FET Chemical Sensors Readily detects H2, CO, Alcohols, Hydrocarbons

  18. Mechanical Transfer • Gears • Wheels • Levers • Rackets • Shuttles; walking beams • Hinge & lock • Articulated beams

  19. Power Device Classes • Extractors using ambient energy • Converters:energy-1 energy-2 • Relays for power(not signal) • Power controllers(beyond relays) • Generators using fuel 1. Uses waste energy, 2. Uses generated energy

  20. Power Extractors Typically utilize machine mechanical vibrations C1 Changing capacitor plate spacing generates power; reverse damper. C2 C2 an be replaced with a magnet. Machines produce mostly 1 KHz to 5 KHz vibrations

  21. Power MEMS • Chemical fuel to: • Mechanical rotation, reciprocation, etc. • Fluid or gas pumping force • Electrical (fuel cell) • Thrust; rocket • Mechanical Electrical (turbo-generator) • Photonic to electrical(really just a converter) • Mechanical, electrical to chemical(battery) 10 to 100 watts 100 K to 1-million RPM

  22. Gas Turbine

  23. on off TI MOEMS: DLP on Over 8-million parts on on off on on Ref. “Digital Light Processing TM for High-Brightness, High-Resolution Applications” Larry J. Hornbeck, Ti.com

  24. 1,400,000 mirrors in one module Texas Instruments DLPTM animation by kbg

  25. Session Summary • Most MEMS are directly electrically powered • Electrostatic is simplest; very popular • Bimorph is ideal for no/low wear beams • Many kinds of mechanical transfer • Sensors will remain largest market • Reliability issues on some, but not all MEMS

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