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T hru the Eyes of a Bug : MEMS for Beginners

T hru the Eyes of a Bug : MEMS for Beginners. I am not a bug. I am an ant!. M E M S ?. I guess you might never heard of MEMS. Where? Tell me. MEMS stands for M icro E lectro M echanical S ystems and we have a plenty of them in our daily lives….

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T hru the Eyes of a Bug : MEMS for Beginners

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  1. Thru the Eyes of a Bug: MEMS for Beginners I am not a bug. I am an ant! NanoFab&BioMEMS @ UCF

  2. MEMS? I guess you might never heard of MEMS.. NanoFab&BioMEMS @ UCF

  3. Where? Tell me. MEMS stands for Micro Electro Mechanical Systems and we have a plenty of them in our daily lives… Me? Super Ant NanoFab&BioMEMS @ UCF

  4. In cars, the airbag sensor is one.. This saved my life! Airbag From www.lanl.gov/quarterly/q_sum03/airbags.shtml NanoFab&BioMEMS @ UCF

  5. Inside of the airbag sensor, a key component is an accelerometer, which detects a sudden motion and send an electrical signal to deploy the airbag. Got it? A mechanical motion and an electrical signal are bridged. MEMS Micro Electro Mechanical Systems NanoFab&BioMEMS @ UCF

  6. Let’s talk about “micro”, then. This is a photo of the accelerometer. Source: Analog Devices Inc. Human hair NanoFab&BioMEMS @ UCF

  7. I am bigger than MEMS! MEMS MEMS The diameter of a human hair is about 50 t0 100 micrometers. 1,000 micrometers become 1 milimeter. Anything smaller than micro? It’s nano. 1,000 nano = 1 micron NanoFab&BioMEMS @ UCF

  8. Source: Texas Instrument, http://www.dlp.com/ This is an array of MEMS mirrors. Yes, the ant is much bigger.. NanoFab&BioMEMS @ UCF

  9. Cool~! Let’s take a close look. These moving mirrors are used for HDTV sets and projectors. Source: http://www.dlp.com/ NanoFab&BioMEMS @ UCF

  10. http://www.interconnect-solutions.com/inkjet-printing.html Hole for ink droplet http://mimech.com/printers/inkjet-printer-technology.asp http://konicaminolta.com/ We can also find a MEMS component in an inkjet printer. NanoFab&BioMEMS @ UCF

  11. As we can see, most of MEMS components are either used for measuring and detecting real world conditions (sensors) or for generating a motion (actuators). Sweet~ Sensor Actuator NanoFab&BioMEMS @ UCF

  12. What is lithography? In summary, miniaturized sensors, actuators and systems fabricated by the use of lithography and/or other precision techniques are called MEMS. NanoFab&BioMEMS @ UCF

  13. I will explain… Need to wear my glasses. NanoFab&BioMEMS @ UCF

  14. Litho means “stone” Graphy means “writing” Original designs are drawn on a hard surface (like a limestone) and they are transferred to a soft substrate (like a paper). NanoFab&BioMEMS @ UCF

  15. The traditional lithography technique uses ink for the pattern transfer. In MEMS technology, a “mask”, “light” and a “photoresist” are used. A mask is similar to a film in a camera. The original design on a mask is transferred to a photoresist. The photoresist is sensitive to light and changes its chemical structure upon exposure. NanoFab&BioMEMS @ UCF

  16. Instead of paper, we use a silicon wafer and coat it with a photoresist, then expose it under the mask. Using lenses we can reduce the size of the image easily. Yes, down to the micron level. NanoFab&BioMEMS @ UCF

  17. The exposed photoresist can be dissolved(+) or left behind(-) after a chemical treatment. Negative Photoresist Mask PositivePhotoresist This process is called development. Light NanoFab&BioMEMS @ UCF

  18. Source: IEEE Spectrum See how it works? NanoFab&BioMEMS @ UCF

  19. Step 1 Step 2 Step 3 Step 4 Eureka! Repeating this photolithography process with deposition and/or etching, we can create complex multilayered structures like this  NanoFab&BioMEMS @ UCF

  20. Do you know what this is? If so, please send an email to joecho@mail,ucf.edu Welcome to the world of MEMS! Source: NanoFab and BioMEMS Lab @ UCF Silicon Sensing Systems Ltd., Lucas NovaSensor, Sandia National Lab NanoFab&BioMEMS @ UCF

  21. Produced by Prof. H. J. Cho • “Ant” character created by A. Wesser • Under the support of National Scicence Foundation • NSF CAREER ECS 0348603 • Coming up… soon. • Thru the eyes of a Bug • BioMEMS for beginners • If you need a copy of this for educational purpose, • please contact joecho@mail.ucf.edu with your name and school name. NanoFab&BioMEMS @ UCF

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