Introduction to MEMS Design and Fabrication. Kristofer S.J. Pister Berkeley Sensor and Actuator Center UC Berkeley. A brief history of MEMS. 1750s first electrostatic motors (Benjamin Franklin, Andrew Gordon) 1824 Silicon discovered (Berzelius)
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Kristofer S.J. Pister
Berkeley Sensor and Actuator Center
Http://www.memsnet.org - probably the best overall MEMS site on the
web. Materials database, bibliography are great.
J. Bardeen, W.H. Brattain, “The first transistor, a semiconductor triode”, Phys. Rev., 74, 230 (1948).