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Static Measurements of Semiconductor Materials

This presentation explores the role of semiconductors as detectors within various fields such as particle physics, astronomy, X-ray spectroscopy, and medical imaging. It covers the theoretical background and experimental setup, along with details on the techniques employed to measure current and capacitance characteristics of semiconductor materials like silicon. The presentation also discusses the challenges encountered during measurements, offers insights into theoretical calculations, and concludes with the significance of obtaining accurate experimental data.

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Static Measurements of Semiconductor Materials

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  1. Static Measurements of Semiconductor Materials Alessandra Borgia PHY651 Professor Marina Artuso December 14, 2009

  2. Outline • Semiconductors as detectors • Theoretical background • Setup & Equipment • Techniques • Measurements • Concluding remarks Alessandra Borgia SU Phy651 Symposium

  3. Semiconductors as detectorsSilicon • Particle physics • Astronomy • X-ray spectroscopy • Medical physics • imaging and scanning • Etc… Alessandra Borgia SU Phy651 Symposium

  4. Examples Pixel or Strip detector Particle track Photodiode Alessandra Borgia SU Phy651 Symposium

  5. A bit of theory behind semiconductor sensors • Measure IV and CV curves to observe characteristics of semiconductor materials. • Diode Equation • Capacitance dependence on bias voltage • c. Depletion voltage and doping concentration • d. Bias voltage and resistivity • (with d in [μm] and ρ in [Ω*cm], in the last equation). Alessandra Borgia SU Phy651 Symposium

  6. Current (A) Voltage(V) Ideal Diode + Resistor Curves Current (A) Voltage(V) Alessandra Borgia SU Phy651 Symposium

  7. Ideal Capacitance Curves Capacitance (F) Voltage (V) [Ref. IV] Alessandra Borgia SU Phy651 Symposium

  8. Experiment • Clean room in SB • Probe station • Labview programs • Power supply and meters • Sample materials • Si Tesla wafer • Hamamatsu photodiodes Alessandra Borgia SU Phy651 Symposium

  9. Schematic Setup and Technique Ref. [V] Alessandra Borgia SU Phy651 Symposium

  10. Initial IV Measurements What is this? There is a trend! Really? This is bad! Cause: Bad connection with probes? Sensitivity of power supply and meter? Cause: Sensitivity of power supply and meter? Alessandra Borgia SU Phy651 Symposium

  11. Second attempt:IV Measurements Alessandra Borgia SU Phy651 Symposium

  12. Initial CV Measurements • Results don’t make any sense! What is this? Linear?! Cause: ???? Cause: Glue between leads! Alessandra Borgia SU Phy651 Symposium

  13. Second Attempt:CV Measurements Vdep~105V Vdep~58V Vdep~20V Alessandra Borgia SU Phy651 Symposium

  14. An example of calculations • Tesla C region diode: • Using the following • ω = 300um • Vdep ~ 50 to 200 V • Resistivity, ρ ~ 2 to 2.5 kΩ cm • N = 2.1 x 1012 cm-3 • Measurements: • Vdep ~ 105V • N =1.54 x 1012 cm-3 • ρ = 3kΩ Alessandra Borgia SU Phy651 Symposium

  15. Conclusion • Good experimental data is time consuming and very difficult to obtain, but worth it! • Measured important values of certain semiconductor materials, silicon. • Gained more experience in experimental techniques. • Understand more about semiconductor sensor physics. Alessandra Borgia SU Phy651 Symposium

  16. Works Cited • Spieler, Helmuth. Semiconductor Detector Systems. Oxford University Press, NY 2005. • Lutz, Gerhard. Semiconductor Radiation Detectors. Springer, NY 1999. • Kemmer, J., et al. Current and capacitance measurements as a fast diagnostic tool for evaluation of semiconductor parameters. Nuclear Instruments and Methods in Physics Research A. 439 (2000) 199-207. • T.J.V. Bowcock. Semiconductor Detectors for Particle Physics Notes. Lausanne University, Switzerland, 2004. • Gwen Lefeuvre. Manuals for measurements in the Clean Room. Syracuse University, 2007. Alessandra Borgia SU Phy651 Symposium

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