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SUPRA25 Gemini Column

SUPRA25 Gemini Column. Highlights Shottky Thermal Field Emission source Beam Booster Electromagnetic aperture changer Annular In-Lens SE Detector Gemini Lens: A dual lens consisting of a magnetic lens and an electrostatic lens. Gemini Lens. Highlights Magnetic Lens Electrostatic Lens

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SUPRA25 Gemini Column

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  1. SUPRA25 Gemini Column • Highlights • Shottky Thermal Field Emission source • Beam Booster • Electromagnetic aperture changer • Annular In-Lens SE Detector • Gemini Lens: A dual lens consisting of a magnetic lens and an electrostatic lens

  2. Gemini Lens • Highlights • Magnetic Lens • Electrostatic Lens • Beam Path • Scanning Coils (not pictured)

  3. Gemini Lens and SE Detection System • Highlights • Electrostatic Field • Annular In-Lens SE Detector • Highest resolution Detector • Detects lowest voltage SE’s • Useable from 2mm • Little topography • Below the Lens Everheart-Thornley Detector (ET or SE Detector) • Lower resolution • Detects SE, and BSD • Bias can be varied from –250 volts to 400 volts • Useable from 3mm to end of working distance range

  4. SUPRA25/SmartSEM User Interface • Highlights • Windows Pull down Menus • Image Plane • User Defined Toolbar • Dynamic Data Zone and Annotation Plane • Status Bar

  5. SUPRA25/SmartSEM User Interface Points of Interest Status Bar • Other Status Bar Features • Progress Bars • Green Check Mark • Yellow Check Mark with Red Slash • Red Check Mark with Red Slash • Mouse Button Assignment Boxes • Macro Status Box • Coarse / Fine Status box • Vacuum Status Box • Gun Status Box • Accelerating Voltage Status Box (EHT)

  6. SUPRA25/SmartSEM User Interface Points of Interest SEM Control Panel - Vacuum Tab • System Vacuum • Chamber Vacuum needs to be 1.5 x 10-5 Torr to • open the Column Chamber valve • Gun Vacuum • The Gun Vacuum should be better than 9.50 x 10- • 9 Torr • Vent inh (inhibit) • Tells the user if the chamber can be vented • Vac Status • Current status of the vacuum system • Column Chamber valve • Status of valve open/closed • EHT Vac ready • Status Yes / No • Column pumping • Status Ready / Requested • Pump / Vent Buttons • Proper button enabled depending upon system • conditions • Partial Vent on Standby • Setting set by key operator Stops the pumps when the system is put into Standby Mode

  7. SUPRA25/SmartSEM User Interface Points of Interest SEM Control Panel - Apertures Tab • Aperture Size • Pull down list • Aperture sizes, 7.50 µm, 10 µm, 20 µm, 30 µm, 60 µm, 120 µm • Focus Wobble • On/Off Switch • Wobble Fast • Fast or Slow Period • Wobble Amplitude • Beam Blanked • Emission • Navigation Box • Mag / Focus, Aperture Align, Gun Align, Stigmation, Beam Shift, Buttons

  8. SUPRA25/SmartSEM User Interface Points of Interest SEM Control Panel - Gun Tab • Current EHT • Current Extractor Voltage • Extractor Current • Filament Current • Beam State • Leave Gun on at Shutdown / EHT off at Log Off (Supervisor setting) • Filament Current Target • Extractor Voltage Target • EHT Target Setting

  9. SUPRA25/SmartSEM User Interface Points of Interest SEM Control Panel - Detectors Tab • Detectors Section • Signal A and Signal B • Collector Bias • Mixing Check Box • Signal Slider • Signal Adjust • Auto BC • Brightness • Contrast • Input LUT Mode

  10. SUPRA25/SmartSEM User Interface Points of Interest SEM Control Panel - Scanning Tab • Operating Mode • Store Resolution • Line Scan, Xray Linescan, Spot, and Dual Mag check boxes • Scan Speeds • Cycle Time • Zoom Factor • Noise Reduction • Freeze on = On Command/ End Frame • Noise Reduction • Pixel Average • Line Average / Integrate • Frame Average / Integrate • Continuous Average • N = • Scan + , Freeze , Scan - Buttons

  11. SUPRA25/SmartSEM User Interface Points of Interest SEM Control Panel - Stage Tab • Stage At • Go To • Delta • Compucentric Mode • Stage Is= Idle / Busy • Z move on Vent • Track Z • Protected Z • Joystick Disable • Undo Stage Goto • Safe Z = Nmm • Stage Stop

  12. SUPRA25/SmartSEM User Interface Points of Interest Annotation Toolbar • Select annotation objects • Mouse Selection • Undo • Open Annotation Items • Save Annotation Items • Delete All Visible Annotation Items • Selection Area • Text Tool • Annotation Parameter selections • Insert user BMP • Line tool • Box tool • Circle tool • Sticky Panels • Zone Mag • Micron Marker • Fixed Micron Marker • Point to Point • Angular Measurement • Line Width Measurement • Radial Measurement • Width Measurement • Height Measurement • Adjustable Cursor Width Measurement • Adjustable Cursor Height Measurement • Line Profile Measurement • Histogram • Tiff Data

  13. SUPRA25/SmartSEM User Interface Points of Interest Tiff Export Dialog Box - Save Tab • Change Directory • File List • Save Button • Merge • Annotation • Overlay • Color Merge • Area: Whole Check Box • Dimensions • Store Resolution • File Name • Wide File List Check Box • User Text

  14. SUPRA25/SmartSEM User Interface Points of Interest Tiff Export Dialog Box - Settings Tab • Image • Grey • 24 Bit Color • As Seen • Pallette • Reduction • Filename • Format • No. • Next

  15. SUPRA25/SmartSEM User Interface Points of Interest Tiff Export Dialog Box - Data Tab • Tiff Data Setup • Add / Remove Buttons • Current Selection:

  16. SUPRA25/SmartSEM User Interface Points of Interest Tiff Import Dialog Box - Load Tab • Image Gallery Button • Change Directory • File List Area • File Information • Step Frame Check Box • Image Reduction • Wide File List Check Box • Image Store / Fit to Image Check Box • User Text • Load At

  17. SUPRA25/SmartSEM User Interface Points of Interest Image Gallery • Load Images to the UIF with 2x Click or Drag and Drop • Select up to 6 images at a time to print to the Default Windows Printer as thumbnails with file name and user text below image • Delete unwanted Images • Load Images to Second Image Window

  18. SUPRA25/SmartSEM User Interface Points of Interest Tiff Import Dialog Box - Standard Data Tab Displays Standard Data stored with every tiff file saved in SUPRA. If the Image has multiple zones then info will be displayed in both Zone windows.

  19. SUPRA25/SmartSEM User Interface Points of Interest Tiff Import Dialog Box - User Data Tab Data selected by the user and stored in the tiff header is displayed on this tab.

  20. SUPRA25/SmartSEM User Interface Points of Interest User Preferences - User Directory Tab To get to this panel go to the “Tools” Pull Down Menu, go down to User Preferences. If the User is allowed to change their User Directory this is the panel to use. The User Directory is where each user’s preference files are stored

  21. SUPRA25/SmartSEM User Interface Points of Interest User Preferences – Image Directory Tab This Panel is used to change the user’s Image Directory This can also be done in the Import and Export Tiff Dialogs.

  22. SUPRA25/SmartSEM User Interface Points of Interest User Preferences – User Level Tab • Pressure Unit – Sets the users preference for pressure unit. The user can also change this by 2x clicking on any pressure unit on the SEM Control Panel • Language- Sets the Users preference for Language • User Access Level- If the user is not locked in to a specific user level then the user can change their user level here. • Error Messages- This setting sets what type of notification the user receives when there is an error on the system

  23. SUPRA25/SmartSEM User Interface Points of Interest User Preferences – Magnification Table Tab Magnification Table To use the Mag Table Click the “Disabled Buttons” to the right until they read “Enabled”. Enter the mag value to the left, once the desired magnifications are entered to the left hit the “Apply Button” at the bottom of the panel. To toggle the Mag Table use the F4 button. To get out of the Mag Table press Shift + F4.

  24. SUPRA25/SmartSEM User Interface Points of Interest User Preferences – Stage Tab • Backlash – Moves stage to a known location and then back to a requested location to ensure proper positioning. • Fast Scanning – Sets Scan speed to a desired (faster) scan speed when the stage is moving, and then sets the scan speed back to the speed it was at when the stage began to move. • Noise Reduction – Turns Noise Reduction off when the stage begins to move, and then returns it to its previous setting when the stage stops.

  25. SUPRA25/SmartSEM User Interface Points of Interest User Preferences – SEM Conditions Tab • Emission Mode • Auto Signal • Crosshairs • Focus Wobble • Reduced Raster • Scan Rate • Beam Blanking • Beam Shift • Aperture Align • Magnification Display • Current Output Device • Polaroid 545 • Reset LUT on unfreeze

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