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MPW Design Introduction Course - Module 4. Process Description Part II. Tyre pressure sensor (SensoNor). Contents. Process Description, Part I Cross section overview Key process features MPW process step-by-step Process Description, Part II Absolute design limitations

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mpw design introduction course module 4
MPW Design Introduction Course - Module 4

Process Description

Part II

Tyre pressure sensor(SensoNor)

contents
Contents
  • Process Description, Part I
  • Cross section overview
  • Key process features
  • MPW process step-by-step
  • Process Description, Part II
  • Absolute design limitations
  • Process control monitors
  • Test data
absolute design limitations
Absolute design limitations
  • To avoid breakage during fabrication
  • Maximum allowed stress 500 MPa under the following conditions:
    • 2000 g acceleration
    • 1 bar (0.8 bar) pressure difference
process control monitors
Process control monitors
  • Test dies
    • electrical parameters
    • mechanical dimensions
process control monitors1
Process control monitors
  • Product wafers
    • Visual inspection
    • Oxide thickness
    • Diaphragm thickness
  • Test wafers
    • Sheet resistivity
    • Film thickness
test data
Test data
  • Automated test data collection
  • Measurement database
  • Process monitoring / SPC
chapter 4 mpw process description
Chapter 4:MPW Process Description
  • End of this chapter
    • Questions or comments?
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