MPW Design Introduction Course - Module 4

MPW Design Introduction Course - Module 4 Process Description Part II Tyre pressure sensor(SensoNor)

Contents • Process Description, Part I • Cross section overview • Key process features • MPW process step-by-step • Process Description, Part II • Absolute design limitations • Process control monitors • Test data

Absolute design limitations • To avoid breakage during fabrication • Maximum allowed stress 500 MPa under the following conditions: • 2000 g acceleration • 1 bar (0.8 bar) pressure difference

Process control monitors • Test dies • electrical parameters • mechanical dimensions

Process control monitors • Product wafers • Visual inspection • Oxide thickness • Diaphragm thickness • Test wafers • Sheet resistivity • Film thickness

Test data • Automated test data collection • Measurement database • Process monitoring / SPC

SPC

Test certificate

Chapter 4:MPW Process Description • End of this chapter • Questions or comments?

MPW Design Introduction Course - Module 4

MPW Design Introduction Course - Module 4

Presentation Transcript

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