Shared Experimental Facilities. Seven Major User Centers Fully staffed, openly accessible, state of the art facilities Nitin P. Padture, Ohio State University, DMR 0820414. Nanotech West Laboratory 8000 sq.ft. full process cleanroom including wet/dry processing,
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Seven Major User Centers
Fully staffed, openly accessible, state of the art facilities
Nitin P. Padture, Ohio State University, DMR 0820414
Nanotech West Laboratory
8000 sq.ft. full process cleanroom including wet/dry processing,
e-beam lithography, ICP-RIE, MOCVD, ALD, dip pen nanowriter,
4 SPMs, spectroscopic ellipsometry, dedicated building, fully staffed.
ENCOMM NanoSystems Laboratory
FIB/SEM, XRD, SQUID, SPM, Langmuir-Blodgett, fully staffed.
Nanoscale Materials Processing Center
4000 sq.ft. cleanroom with standard process tools,
ICP-RIE, training labs, fully staffed.
Electronic Materials and Nanostructures Lab
Oxide MBE, CL/SEM, PL, SIMS.
Campus Electron Optics Facilities
7 TEM/SEMs, 4 XRDs, 2 FIBs, fully staffed.
Ohio Suprcomputer Center
IBM Opteron Cluster 1350, BALE cluster, mass
storage environment, fully staffed.
Semiconductor Epitaxy and Analysis Laboratory
Cluster of 3 MBEs (III-AsP, III-N, metal) with XPS/AES
chambers, also XRD, Hall effect, PL, ECV, fully staffed.
An NSF Materials Research Science and Engineering Center (MRSEC)
Supported under NSF Award Number DMR-0820414