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Shared Experimental Facilities. Seven Major User Centers Fully staffed, openly accessible, state of the art facilities Nitin P. Padture, Ohio State University, DMR 0820414. Nanotech West Laboratory 8000 sq.ft. full process cleanroom including wet/dry processing,

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Shared Experimental Facilities

Seven Major User Centers

Fully staffed, openly accessible, state of the art facilities

Nitin P. Padture, Ohio State University, DMR 0820414

Nanotech West Laboratory

8000 sq.ft. full process cleanroom including wet/dry processing,

e-beam lithography, ICP-RIE, MOCVD, ALD, dip pen nanowriter,

4 SPMs, spectroscopic ellipsometry, dedicated building, fully staffed.

ENCOMM NanoSystems Laboratory

FIB/SEM, XRD, SQUID, SPM, Langmuir-Blodgett, fully staffed.

Nanoscale Materials Processing Center

4000 sq.ft. cleanroom with standard process tools,

ICP-RIE, training labs, fully staffed.

Electronic Materials and Nanostructures Lab

Oxide MBE, CL/SEM, PL, SIMS.

Campus Electron Optics Facilities

7 TEM/SEMs, 4 XRDs, 2 FIBs, fully staffed.

Ohio Suprcomputer Center

IBM Opteron Cluster 1350, BALE cluster, mass

storage environment, fully staffed.

Semiconductor Epitaxy and Analysis Laboratory

Cluster of 3 MBEs (III-AsP, III-N, metal) with XPS/AES

chambers, also XRD, Hall effect, PL, ECV, fully staffed.

An NSF Materials Research Science and Engineering Center (MRSEC)

Supported under NSF Award Number DMR-0820414


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