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Cleanroom Safety Training - PowerPoint PPT Presentation


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Cleanroom Safety Training. 2 nd Edition, NR. All users must first complete the annual safety training offered through the WUSTL Environmental Health and Safety department. http://ehs.wustl.edu/training/Pages/default.aspx. Areas of the Cleanroom. Wipe Down. Entry. Class 1,000 Bay. Entry

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slide2
All users must first complete the annual safety training offered through the WUSTL Environmental Health and Safety department.

http://ehs.wustl.edu/training/Pages/default.aspx

slide3
Areas of the Cleanroom

Wipe

Down

Entry

Class

1,000Bay

Entry

Vestibule

Class

1,000Bay

Class

10,000 Bay

Gowning

Class100Bay

Shower &

Eye Wash Station

Main Entrance/Exit

Emergency Exit

First Aid Kit

slide4
Personal Safety

• Eating, drinking, smoking, handling contact lenses and applying cosmetics is strictly prohibited in areas where hazardous laboratory chemical or biological materials are used or are intended for use.

• Storage of food and beverage in containers or in areas that are intended or are used for storage of hazardous laboratory materials is prohibited.

slide5
Off-hours Use

Operation of equipment or completion of any process off-hours requires a MINIMUM of 2 authorized users in the cleanroom at all times.

20 hours of daytime use and an additional training are required for off-hours instrument and cleanroom use.

No Hydrofluoric Acid use off-hours.

slide6
User’s Chemicals and Samples

“NEW” chemicals must first be approved by Staff. Confirm there is a MSDS for the chemical you wish to bring in. You are responsible for providing an MSDS if there is not a copy in the MSDS notebook.

All chemicals and samples brought into the lab must be clearly labeled with user name, group name, contact info, chemical name and the date.

Unlabeled chemicals and samples are subject to disposal.

Liquid-filled containers in fume hood must be labeled with contents, user name, PI, expected time of disposal and phone number. The maximum time for unattended chemicals is 12 hours.

slide7
Allowed & Prohibited Items

Cleanroom notebooks are required for taking notes in the cleanroom. Cleanroom paper will be available for notes. All approved items that are brought into the cleanroom must be wiped down to remove dust particles and oil.

slide8
Cleanroom Gowning

Standard laboratory dress code applies under all cleanroom attire.

slide9
Cleanroom Gowning

Users may store personal items in one of the lockers outside of the gowning area. Frequent users will receive there own locker to share with their group.

slide10
Cleanroom Gowning

• Each user receives a hood, a garment, and a pair of cleanroom boots to be worn in the class 1,000 and class 100 bays.

Class 10,000 bay users only need shoe covers, a hairnet and lab coat.

slide11
Class 1000/100 NRF Gowning Process

Put your name, instrument used, gases and chemicals used on the dry erase board.

Sign into the FOM system and log into the instrument.

slide12
Class 1000/100 NRF Gowning Process

Clean shoes with motorized shoe cleaner.

Put on shoe covers and hair net.

Swipe card key and enter cleanroom.

slide13
Class 1000/100 NRF Gowning Process

Place all items on the wipe down table and put on a pair of gloves.

Using the spray bottle, moisten a cleanroom wipe with the water/isopropanol solution and wipe down all the items being brought into the cleanroom.

slide14
Class 1000/100 NRF Gowning Process

Put on the cleanroom hood and snap the hood under the chin.

Put on the cleanroom suit being careful not to drag the suit on the floor in the process. Tuck the bottom of the hood into the suit, zip it up and snap the top snap.

Put on two boots and be sure to snap them on the back of the legs.

slide15
Class 1000/100 NRF Gowning Process

When exiting the cleanroom, simply reverse the steps, placing the coverall and hood on a hanger and the boots in the storage rack. Gloves can be placed in the trash and shoes covers and hairnets can be placed in locker for later use.

Once in the cleanroom, your suit should not be opened or unzipped. Return to gowning room to retrieve items from within suit. Anything that a user needs access to while in the cleanroom(cell phones, electronics, ect) should be taken out while in the gowning room and wiped down.

slide16
Hazardous Waste

All cleanroom waste must be properly disposed.

slide17
Hazardous Waste Containers

Solvent Waste

Acid Waste

(HF, HCL, ect)

Photolithography

Solid Waste

Wipe

Down

Class

1,000Bay

Entry

Vestibule

Class

1,000Bay

Class

10,000 Bay

Gowning

Class100Bay

slide18
General Waste Container

Wipe

Down

Class

1,000Bay

Entry

Vestibule

Class

1,000Bay

Class

10,000 Bay

Gowning

Class100Bay

All non chemical waste.

slide19
Cleanliness

As an open facility we rely on users to clean up after themselves. Maintaining cleanroom cleanliness is a matter of courtesy and safety.

slide20
While Working in the Fume Hoods
  • Do not leave funnels in waste containers
  • No containers are to be left in the sinks
  • Hazardous materials should be at least 6 inches behind the sash of the fume hood
slide21
While Working in the Fume Hoods

• All manipulation (transferring containers, pipetting, etc…) of chemicals should take place in a fume hood.

slide22
While Working in the Fume Hoods
  • Clean photo resist spinners after each use
  • Wipe up any spills immediately.

If a hazardous chemical spill occurs outside of a fume hood, you should evacuate the lab immediately and notify NRF staff and University Police(5-5555).

slide23
Cleanliness
  • Be considerate of others and clean up after yourself.
  • Please leave amenities in the cleanroom as clean or cleaner than you found it.
slide24
Hydrofluoric Acid

Hydrofluoric acid can pose significant health risk and should be handled cautiously. Special training is required to use HF and it should never be used while alone.

slide25
Hydrofluoric Acid Safety

Hydrofluoric acid (HF) presents a significant health hazard!

HF is used in the cleanroom in both its pure and dilute form.

HF is the active component in Buffered Oxide Etch (BOE)

Used to etch silicon dioxide and for stripping native oxide prior to processing.

Both liquid and vapor can cause severe burns, which may not be immediately painful or visible.

HF will penetrate skin and attack underlying tissues, including bone.

slide26
Hydrofluoric Acid Exposure

Exposure to HF requires medical attention.

If exposure to HF occurs, remove yourself and victim from contaminated area. Immediately wash burned area with water for at least 5 minutes and apply 2.5% calcium gluconate gel.

Calcium gluconate is a topical antidote that should be applied liberally after any HF exposure.

Calcium gluconate can be found in the cleanroom first aid kit.

Always follow proper notification protocol and report accidents and emergency situations to NRF staff.

slide27
Hydrofluoric Acid Use

HF etches glass thus it must not be kept in a glass bottle or used in a glass beaker.

Regardless of concentration of HF, it may NOT be disposed of down the drain.

HF must be used only in the HF designated area in the acid fume hood. It may not be removed in a beaker from the hood.

Full face shield, acid apron, neoprene outer gloves and nitrile inner gloves are required when using HF or BOE.

slide28
Consumables

Consumable cost will be passed on to users.

slide29

Consumables

Available Chemicals

Solvents

Acetone

Isopropanol (IPA)

Methanol

Ethanol

Photoresists

SU-8 2010

SU-8 2050

SU-8 2

PMMA

AZ 5214 E

Developers

AZ 327 MIF

SU-8 Developer

PG Remover

MF Developer

Acids

Transene(H3PO4 & HNO3)

Hydrofluoric Acid (HF)

Sulfuric Acid (H2SO4)

Buffered Oxide Etch (BOE)

slide30

Available Materials

Open Use

Cleanroom Wipes

Plastic Pipettes

Petri Dishes

Aluminum Foil

Upon Request

Gold Pellets

Silver Shot

Aluminum Pellets

Copper Pellets

Chromium Pieces

Titanium Pellets

2”, 3”, 4” Si Wafers

3” x 1” Glass Slides

Material prices are passed on to users and are subject to change.

slide31

Cleanroom Gases

    • BCl3
    • HBr
    • NF3
    • Cl2
    • SF6
    • CH4
    • H2
  • O2
  • Ar
  • He
  • N2
slide32
Alarms

A variety of reactive gases are used in the cleanroom and an alarm system monitors these chemicals using sensors throughout the cleanroom.

slide33
Alarm Protocols

Yellow Alert

In the event of a YELLOW alarm all personnel in the cleanroom should exit via the gowning area and IMMEDIATELY notify NRF Staff.

slide34
Alarm Protocols

Red Alarm

In the event of a RED alarm all personnel in the cleanroom should IMMEDIATELY exit via the doors to the hallway and notify NRF Staff. DO NOT exit through the gowning area or the service chase.

In the event of a RED alarm ALL PERSONNEL should exit the basement until NRF Staff has confirmed that the area is safe.

If you believe someone has collapsed in the cleanroom area DO NOT attempt to retrieve them! Call 935-5555 and request a Hazmat team.

DO NOT attempt to diagnose an alarm condition or turn off an alarm on your own. Always wait for NRF Staff to respond to the situation.

slide36
Citation Requirement

The NRF is supported by the National Science Foundation through the Nanotechnology Infrastructure Network. It is important for users to properly cite the support of facilities of the NRF in all publications and presentations made possible by work performed at the NRF.

For papers, a suggested acknowledgement reads: “This work was performed in part at the Washington University in St. Louis Nano Research Facility, a member of the National Nanotechnology Infrastructure Network, which is supported by the National Science Foundation (Grant ECS-0335765).”

slide37
Before your safety training is completed you need to:

Take Our Safety Training Quiz: http://www.surveymonkey.com/s/VJCGFC3

Take a Cleanroom Tour

Have a Follow-up Cleanroom Safety Training with a NRF Staff Member