Cleanroom safety in McGill Nanotool fab

1. Cleanroom safety in McGill Nanotoolfab John Li Feb-2013

2. Contents • Purpose • cleanroom safety rules • New rules implemented • Emergency procedures • Summary

3. Purpose • Reinforce the general safety policies • Keys safety practices in the cleanroom • New safety practices implementation

4. Cleanroom safety: where to start • Review the Safety and Behavior video • Review the Microfab's Policies • Review the chemical list http://mnm.physics.mcgill.ca/content/list-chemicals-available-cleanroom (with MSDS) • Review the wet benches process http://mnm.physics.mcgill.ca/content/wet-benches • Review online safety training from McGill EHS unit http://cool.mcgill.ca/COOLLectureListing.aspx?Semester=TRAINING&Course=EHS

5. Cleanroom safety: The consequence not following rules Dangerous for yourself and other users if not follow the rule properly (HF burned examples)

6. Cleanroom safety: Do’s/Don’ts • Always use bottle rinser to rinse/dry emptied bottle (acid/solvent) before put in pass-through and marked • Always use the dedicated green glove to transfer new acid bottle to acid bench • Always label your chemical in beaker (acid/solvent bench) all the times • Never touch acid bench N2 gun with cleanroom gloves • Never leave glassware in dump rinser after done • Never leave outside of green marker area with PPE on (except for getting chemical from cabinet or pass-through)

7. Cleanroom safety:Do’s and Don'ts at Acid bench (I) Do’s Don’ts

8. Cleanroom safety: Do’s and Don'ts at Acid bench (II) Do’s Don’ts

9. Cleanroom safety:Transfer samples at wetbench • Prepare your solution with PPE on • Wearing Apron and cleanroom gloves(Not green gloves), and with your own tweezers, to transfer your samples on clean/dry wipes • Put back on all PPE, using tweezers at wetbenchto put samples in your beaker • Once Etching done, rinse, dry your samples and clean/dry the bench surface as well. And put the your samples on dry/clean wipe • Remove green gloves, and face shield (if you prefer), using your own tweezers to put the samples in your petri dish

10. Cleanroom safety: Pictorial steps of transferring samples at wetbench Before Etch Prepared Acid solution with PPE on Remove green gloves, transfer your sample With your own tweezers to clean/dry wipe After Etch Once finished your work, Put back PPE to Rinse/dry your samples and clean bench Then remove green gloves, with cleanroom gloves transfer your samples from wipes to petri dish with your own tweezers

11. Cleanroom safety: Cleanup A clean wetbench is a safe wetbench Wet Bench checklist: Return all chemicals to their proper storage area Dispose of any used chemicals Rinse out all containers you have used (graduated cylinders, beaker, etc.) and remove them from sink after rinse Clean and dry the wetbench surfaces

12. Cleanroom safety: Transfer chemical bottles from pass-through to wetbench • Use the dedicated green gloves (which clamped by pass-through • Do NOT use cleanroom gloves

13. Cleanroom safety: green gloves in the proper position and order Gloves for Metal bench Gloves for Acid bench

14. Cleanroom safety:cleanup Gloves for Site Coater Gloves for Laurell coater

15. Cleanroom safety: Chemical disposal • Solvent and resist (To solvent waste container) • Acid and Base (TMAH) (cool down and dump in drain) • Metal etchant (dedicated waste containers) • Empty bottles of Acids and Solvents (rinse, mark and put in pass-through)

16. Emergency Procedures: Evacuation (I) Should any of the following situations occurs: • Ventilation system failure (ie., fresh air/exhaust systems/cleanroom power failure) • Large chemical spill • Fire alarm sounded • or should any other imminently dangerous situation present itself

17. Emergency Procedures: Evacuation (II) Must take the following actions IMMEDIATELY: • WARN anyone within their immediate area of the danger. • TURN OFF any equipments being used via the safest manner if possible. • EXIT the fab in a calm, orderly manner via: • INFORMFab Personnel OR call McGill Security by dialing 3000

18. Emergency ProceduresAccidental contact with a chemical • Remove contaminated clothing and flush with cold water for at lease 15 minutes. • The extent of any injury, even if no injury seems apparent, MUST be evaluated by a medical doctor immediately • In case of HF, gently massage calcium gluconate ointment into skin. This material in the NanoLab First Aid Kit

19. Emergency Procedures: Fire safety • When you hear a fire alarm you must immediately exit the Clean Room through the closest emergency exit doors (No need to remove clean room bunny suits). • Trigger an alarm if it is possible when a fire occurs in cleanroom

20. Report to staff immediately when • There is abnormal smell or odour • There is strange noise/sound • There is gas/water leak • Or any other abnormal situations

21. Summary • Clean fab is a safe fab • All users in the microfab are expected to take steps to ensure that health and safety of other lab members will not be endangered. • Every users are requested to correct other users dangerous behaviours in cleanroom • It is YOUR fab and YOUR safety matters