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Excimer Laser Repair Corporation ™ Corporate Profile. MISSION STATEMENT:. ELRC’s mission is to reduce the cost of ownership for users of Cymer lasers through reduced parts costs, training and maintenance tools to enable the customer control performance and operation of customer’s excimer lasers.

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mission statement


ELRC’s mission is to reduce the cost of ownership for users of Cymer lasers through reduced parts costs, training and maintenance tools to enable the customer control performance and operation of customer’s excimer lasers.

ELRC Confidential

elrc customer focus
ELRC Customer Focus
  • Dedicated saving operating costs for their photolithography lasers.
  • Repair, refurbish, service, and supply maintenance tooling for Cymer lasers series 5000, 6000, and 7000 series.
  • Training and tools to enable customer to take greater control of all aspects of their excimer lasers.

ELRC Confidential


ELRC History

  • Founded: March 2005
  • Location: San Diego, California
  • Target market: Cymer excimer lasers
  • Ownership: Private Funding
  • Employees: 10 full time and 6 part time
  • Properties: >6,000 square feet of space

ELRC Confidential

elrc key employee profile
ELRC Key Employee Profile

ELRC Confidential

products and services offered
Products and Services Offered
  • Photolithography Excimer Laser Full system support
  • System refurbishment with OEM equivalent warranties
  • Parts and service for the following Models;
    • ELS-5000
    • ELS-6000
    • NL-7000*

*Non-Consumables available now, consumables late 2011.

ELRC Confidential

additional products and services offered
Additional Products and Services Offered
  • Refurbish entire lasers with warranties.
  • On-site training with maintenance tools
    • 95% or more of laser maintenance can be done by customer personnel.
      • Save on expensive service contracts
      • Increase uptime—no waiting for service people.
  • Consignments
    • Current consignments in Austin, Portland, Seoul, Singapore and in Europe.
    • Can be set up at customer location or local office.

ELRC Confidential

products and services
Products and Services
  • Your business strategy
    • Buy parts as needed
    • Equivalent to OEM “by-the-pulse”.
    • Other ideas, we are flexible.
  • Train customers
    • ELRC facility
    • Customer fab
    • Laser Operations, level 1 and Higher

ELRC Confidential

products and services tools
Products and services--Tools
  • ELRC developed maintenance tools to diagnose electrical, mechanical and optical performance
  • Software:Works with other tools to automate the power and pressure calibration of the laser.
  • (PPMD) Portable Pressure Measurement Device: Calibrates gas pressure transducers.
  • (PMCT) Power Measurement Calibration Tool: Calibrates internal energy monitor.
  • (CBAT) Coarse Beam Alignment Tool:Visual beam alignment check.
  • (QBIT) Quantitative Beam Imaging Tool: Digital image of the beam profile and alignment—optimize laser energy output.
  • (PTTT) Pulse Timing Tool: Ensures accurate timing between trigger and laser pulse.

ELRC Confidential


ELRC software interface

  • Software calculates offsets and configurable settings then automatically updates laser with new values.

ELRC Confidential

portable pressure measurement device ppmd
Portable Pressure Measurement Device (PPMD)
  • Calibrates internal pressure transducers
      • Software calculates and updates the offsets and configurables.
        • Accurate gas refills
        • Precise gas injections to optimize voltage, bandwidth, and energy sigma.
        • No manual data entry-fewer mistakes.

ELRC Confidential

power meter calibration tool
Power Meter Calibration Tool
  • Calibrates the internal energy monitor.
      • Software automatically updates laser system with the calibration data.
    • Meter easily fits on laser at beam dump location.

Custom Power meter with

insertable mirror attached

Installed on laser

ELRC Confidential

c oarse b eam a lignment t ool
Coarse Beam Alignment Tool
  • Visual image of the beam
      • Ensure the line narrowing module, chamber, and wavelength stabilization module are aligned.
  • Fits on laser at beam dump location
    • Installs in seconds.

In use

ELRC Confidential

q uanititative b eam i maging t ool
QuanititativeBeam Imaging Tool
  • Digital image of beam profile.
  • Image stored for comparison to prior images
    • Track performance over module life.
  • Quantitative beam energy distribution
    • Align for maximum energy out.

June ’11 ELRC Confidential

qbit tool
  • Software Screen view
  • Unit installed in Laser

July ‘10 ELRC Confidential

facilities in san diego
Facilities in San Diego
  • Four labs with 7 lasers installed.
    • 3-5000s, 1 development, 2 test
    • 3-6000s, 1 development, 2 test
    • 1-7000 used for both development and test
  • 500 square feet of clean assembly
  • clean and tear down area
  • Warehouse with large parts storage

ELRC Confidential

current install base
Current install base
  • 5000 series
    • >120 discharge chambers
    • >60 optical modules, WSM and LNM
  • 6000 series
    • >50 Discharge Chambers
    • > 25 Optical modules
    • Other parts required to support the systems available.
    • Other parts including vacuum pumps, High Voltage Power supplies, commutator, F2 traps, boards, water modules etc.

ELRC Confidential

customer installations
Customer Installations

European Installations:

Germany, Israel

Asia Installations:

S. Korea, China,

Japan, Singapore,

Taiwan, Malaysia

USA Installations:

Austin, Dallas,

Colorado Springs,

Los Angles, Portland,

San Jose, Virginia

ELRC Confidential

sales and support
Sales and Support
  • Direct Sales in the US
    • Expert service engineers in Austin and Escondido.
    • Phone support from factory and service engineers.
    • Parts depots in Austin, Portland and Escondido.
  • Representatives in overseas locations
    • OEM trained service engineers.
    • Inventory stocked in Europe, Seoul, Singapore,

ELRC Confidential

distribution and represtation
Distribution and represtation

Europe is covered

both direct and with



Direct Sales

Asia representation in:

S. Korea, China,

Japan, Singapore,

Taiwan, Malaysia

Consignment Stock:

USA , S. Korea, China, Japan, Singapore, Taiwan

ELRC Confidential

  • ELRC provides a low cost solution for laser operations
  • Provide ALL parts necessary for your 5000, 6000 generation Cymer lasers
  • Provide the parts, services, tools and training to be your complete source for Cymer laser support.

ELRC Confidential