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p.1005

p.1005. Fig 32-CO, p.1003. 20nm Au/20 nm Ti. 20nm Au/20 nm Ti. 65 μ m. Cu. Cu. Cu. 140nm Cu/40 nm Ti. 65 μ m. Cu. Cu. Cu. 140nm Cu/40 nm Ti. NiZnCu ferrite. Si. 300 nm thick SiO 2. Si. 20nm Au/20 nm Ti. Miniature air-core and magnetic inductors (5 mm x 5 mm). Air-core inductor.

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p.1005

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  1. p.1005

  2. Fig 32-CO, p.1003

  3. 20nm Au/20 nm Ti 20nm Au/20 nm Ti 65μm Cu Cu Cu 140nm Cu/40 nm Ti 65μm Cu Cu Cu 140nm Cu/40 nm Ti NiZnCu ferrite Si 300 nm thick SiO2 Si 20nm Au/20 nm Ti Miniature air-core and magnetic inductors (5 mm x 5 mm) Air-core inductor Magnetic-core inductor 4” wafer 4” wafer 3 CONFIDENTIAL

  4. Fig 32-1, p.1004

  5. Fig 32-2, p.1005

  6. Fig 32-3, p.1007

  7. Fig 32-17, p.1017

  8. Fig 32-4, p.1008

  9. Fig 32-5, p.1008

  10. Fig 32-6, p.1008

  11. Fig 32-7, p.1009

  12. Fig 32-8, p.1009

  13. Fig 32-9, p.1009

  14. Fig 32-10, p.1010

  15. Fig 32-11, p.1010

  16. Fig 32-11a, p.1010

  17. Fig 32-11b, p.1010

  18. Fig 32-12, p.1010

  19. Fig 32-13, p.1013

  20. Fig 32-14, p.1013

  21. Fig 32-15a, p.1015

  22. Fig 32-15b, p.1015

  23. Fig 32-16, p.1015

  24. Fig 32-17a, p.1017

  25. Fig 32-17b, p.1017

  26. Fig 32-17c, p.1017

  27. Fig 32-17d, p.1017

  28. Fig 32-17e, p.1017

  29. Fig 32-18, p.1018

  30. Fig 32-19, p.1019

  31. Fig 32-20, p.1019

  32. Fig 32-21, p.1020

  33. Fig 32-22, p.1020

  34. Table 32-1, p.1021

  35. Fig 32-23a, p.1022

  36. Fig 32-23b, p.1022

  37. Fig 32-24, p.1022

  38. Fig Q32-5, p.1024

  39. Fig Q32-7, p.1024

  40. Fig P32-12, p.1025

  41. Fig P32-17, p.1026

  42. Fig P32-23, p.1026

  43. Fig P32-25, p.1026

  44. Fig P32-26, p.1026

  45. Fig P32-27, p.1026

  46. Fig P32-45, p.1027

  47. Fig P32-48, p.1028

  48. Fig P32-52, p.1028

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