Introduction:. Perfectly Matched Layers:. High frequency surface-micromachined MEMS resonators have many applications Filters, frequency references, sensors Need high quality factors Difficult to predict analytically Existing tools predict frequency, but not Q
Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author.While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server.
Perfectly Matched Layers:
Basic Loss Mechanism:
Model of a Disk Resonator:
Device micrographs (top) and schematic (bottom)
Displacement and mean energy flux at resonance
Simulated Q for two modes (solid lines, left) at different film thicknesses matches lab measurement (dots). The behavior is explained by the interaction of two complex frequencies near a critical geometry.