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Advanced Electrostatic Comb Drive Systems with Folded Beam Suspension Technology

This document explores the innovative design and application of electrostatic comb drive systems, specifically featuring folded beam suspension mechanisms. These systems provide precise motion control and are essential in microelectromechanical systems (MEMS). The integration of folded beam suspension enhances the performance and stability of comb drives, making them suitable for various applications in sensors, actuators, and robotics. This study reviews the engineering principles, advantages, and potential applications of these advanced electrostatic systems.

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Advanced Electrostatic Comb Drive Systems with Folded Beam Suspension Technology

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    1. Electrostatic Comb Drive Systems Oct. 4, 2010

    2. Comb Drive With Folded Beam Suspension

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