X-ray Microanalysis. The fluorescent production of X-rays by electrons is one of the most important interactions available in the SEM because it permits chemical (atomic) identification and quantitative analysis to be performed About 60% of all SEMs are now equipped for X-ray microanalysis.
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Silver L-line cluster
Xray generates electron/hole pairs (3.6eV / pair)
Charge ~ Xray energy
Visibility and peak height
X-ray generation in silicon
Distribution of X-ray lines as a function of spectral energy