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This innovation presents a silicon carbide pressure sensor capable of withstanding temperatures up to 500°C, suitable for compressor hot section applications in aircraft turbine engines. The sensors have been tested successfully and offer fast response measurements for stall detection and control. Commercialization opportunities include engine development and testing. Government applications and funding have been secured for further development and deployment in military aircraft and other turbine engine systems.
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6H-SiC Pressure Sensors for High Temperature Applications Small Business Innovation Research Kulite Semiconductor Products, Inc. Leonia, NJ INNOVATION A silicon carbide (SiC) pressure sensor for use at temperatures as high as 500C, which is approximately 100C higher than can be withstood by presently available silicon pressure sensors • ACCOMPLISHMENTS • Prototype SiC pressure sensors were developed in Phase II contract • The pressure sensors were shown to be capable of operating at 500C for several hours • Provided GRC with prototype SiC pressure sensors • COMMERCIALIZATION • A high temperature pressure sensor for engine aircraft development and test. Fast response pressure measurements in the compressor hot section for stall detection and control • This pressure sensor can be used for other high temperature turbine engine applications SiC Sensor Mounted on a Header • GOVERNMENT/SCIENCE APPLICATIONS • Phase III of $500K to provide GRC with 6-10 prototype SiC pressure sensors. Funding provided by Advanced High Temperature Engine Material Technology Program (HITEMP) and Higher Operating Temperature Propulsion Components (HOTPC) Program. • A prototype SiC pressure sensor was successfully tested at Honeywell in Phoenix, AZ in September 2000. Additional testing is planned at Pratt & Whitney in 2001. • For use in military aircraft and any other turbine engine, e.g., tanks Glenn Research Center Instrumentation 3-046 1991 Phase II, NAS3-27011, rev. 5/01 NASA Contact – Glenn Beheim Company Contact – Alex Ned 53