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FNAL 65nm test structures TZ65 chip Fermilab CMS p ixels project March, 2013. 65nm test structures (TZ65 chip). Submission in March 2013 (MOSIS run 03/25/2013) 2×6mm 2 ,divided in two parts Cost $83k ( expensive ) TSMC 65nm, 1P9M, 2MT 900Å, 14500 Å AP, No RV

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65nm test structures tz65 chip
65nm test structures (TZ65 chip)

Submission in March 2013 (MOSIS run 03/25/2013)

2×6mm2 ,divided in two parts

Cost $83k (expensive)

TSMC 65nm, 1P9M, 2MT 900Å, 14500Å AP, No RV

  • Design: Farah Fahim and AlpanaShenai
  • Open for sharing with institutions interested in: technology, hot carrier degradation and irradiation tests

General comments

  • Submissions in 65nm every 2 weeks via MOSIS
  • Very efficient and professional technical support for TSMC 65nm provided by MOSIS, many questions generated
  • Troubles with understanding of DFM rules, verification: DRC and LVS run very slowly, upgrade of tools required, e.g. parasitics extraction

CMS pixels project, March, 2013

65nm chip1
65nm ½chip1

Gate1

even

Gate2

even

Gate3

even

Gate4

even

Gate5

even

sub

well

Oscillator Out3

Oscillator Out2

Oscillator Out4

Oscillator Out1

Vddd!

Vssd!

Table of transistor sizes

Oscillators

4 ring oscillators

  • With 923 inverting stages each with the following inverter sizes
  • PMOS 2u/60n; NMOS 1u/60n
  • PMOS 2u/130n; NMOS 1u/130n
  • PMOS 2u/200n; NMOS 1u/200n
  • PMOS 2u/300n; NMOS 1u/300n

Gate2

odd

Gate4

odd

Gate5

odd

Gate1

odd

Gate3

odd

Vddd!

Vssd!

CMS pixels project, March, 2013

65nm chip11
65nm ½chip1

Oscillator1

Oscillator2

Oscillator3

schematics

Oscillator4

G1odd

G2odd

G3odd

G4odd

G5odd

G1even

G2even

G3even

G4even

G5even

CMS pixels project, March, 2013

65nm chip2
65nm ½chip2

CMS pixels project, March, 2013

65nm chip21
65nm ½chip2

BlockA

BlockB

BlockB

BlockC

BlockC

CMS pixels project, March, 2013

65nm chip22
65nm ½chip2

details of BlockA schematics

Nmos Transistors

(nch)

M1: .12/.06

M2: .24/.06

M3: .36/.06

M4: .48/.06

M5: .6/.06

M6: 1/.06

M4

M1

M2

M3

M5

M6

Nmos Transistors

(nch)

M7: 5/.5

M8: 5/5

M9: 2.05/.06

M10: 1.5/.3

M11: 2.24/.3

M12: .12/.06

M13: 5/.06

M11

M12

M7

M8

M10

M13

M9

CMS pixels project, March, 2013

65nm chip23
65nm ½chip2

details of BlockBschematics

NMOS Transistors

(nch_25)

M14: .4/.28

M15: .5/.28

M16: .8/.28

M17: 1/.28

M18: 5/.5

M19: 5/5

M20: 2.22/.28

M21:3.38/1.2

M22: .4/.28

M23: .8/.28

M24: 3.45/1.2

M14

M15

M16

M17

M18

M19

M20

M21

M22

M23

M24

PMOS transistors

(pch)

M25: .12/.06

M26: .36/.06

M27: .60/.06

M28: 1/.06

M29: 5/.5

M30: 10/10

M31: 5/5

M26

M28

M30

M25

M27

M31

CMS pixels project, March, 2013

65nm chip24
65nm ½chip2

details of BlockCschematics

PMOS Transistors

(pch_25)

M31: .4/.28

M32: .5/.28

M33: .8/.28

M34: 1/.28

M35: 5/.5

M36: 5/5

M36

M31

M35

M32

M33

M34

CMS pixels project, March, 2013

65nm chip25
65nm ½chip2

Summary with size and number of Pads

CMS pixels project, March, 2013

submitted layout
Submitted layout

Fermilab Institutional Review, June 6-9, 2011