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Advisor: 吳坤憲 Number:4990h003 Student: 張有成

Rutherford Backscattering Spectrometry 拉塞福回向散射儀. Advisor: 吳坤憲 Number:4990h003 Student: 張有成. Outline. History Structure Application Conclusion References. History.

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Advisor: 吳坤憲 Number:4990h003 Student: 張有成

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  1. Rutherford BackscatteringSpectrometry 拉塞福回向散射儀 Advisor:吳坤憲 Number:4990h003 Student:張有成

  2. Outline • History • Structure • Application • Conclusion • References

  3. History Ernest Rutherford, 1st Baron Rutherford of Nelson,  (30 August 1871 – 19 October 1937) was a New Zealand-born physicist who became known as the father of nuclear physics .

  4. What is Backscattering Backscattering

  5. What is Rutherford BackscatteringSpectrometry Rutherford backscattering spectrometry (RBS) is used to determine the structure and composition of materials by measuring the backscattering of a beam of high energy ions impinging on a sample.

  6. Structure

  7. Structure

  8. Application • The Rutherford BackscatteringSpectrometry can be used in： • (a) Measure the film thickness. • (b)Measure the doping profiling. • (c) Determined the composition ratio of the elements. • (d) Observation the material cause migration phenomenon

  9. Application

  10. Conclusion • A sample measuring only spend to 10-20 min. • RBS can measured the film thickness and doping profiling. • Can be measured Au,As,Mo volume in Si semiconductor. • Thecomputer software can simulate the RBSspectra.

  11. Shortcoming • The equipment is expensive. • Don’t measuring the light element. • Ifthe value K is too close to be measuring of the heavy element.

  12. References • 拉塞福背向散射:http://www.phys.sinica.edu.tw/~ibalab/RBS/RBS.htm • 材料分析 主編:汪建民 • Applying ion beam analysis:http://www.hzdr.de/db/Cms?pOid=29856&pNid=0 • 維基百科-Ernest Rutherford :http://en.wikipedia.org/wiki/Ernest_Rutherford • SUPPORT OF PUBLIC AND INDUSTRIALRESEARCH USING ION BEAM TECHNOLOGY: http://www.spirit-ion.eu/v1/Project/Techniques/RBS.html • 清華大學加速器實驗室 • 申請單網址:http://acc.web.nthu.edu.tw/files/87-1080-114.php • E-mail: instr@my.nthu.edu.tw

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