Unit for Nano Fabrication

1. Unit for Nano Fabrication Clean Room Principles July 2008

2. Safety - General • It is FORBIDDEN to enter the clean room without signing in with the personal ID card • Guests will receive “VISITOR” card • The ID card is for the personal use ONLY • Never work in the Clean Room alone • Regular working hours: from 8AM to 5PM; work out of working hours needs authorization • All the chemicals going into the clean room must be approved and cataloged by Noa Mazorsky

3. Safety – Alarms • Fire Alarm • Security Alarm • Exhaust Alarm Go out from the clean room Call for a UNF staff member

4. Safety – Emergency Exits

5. Safety– Emergency Electricity Breakers

6. Safety – Fire Extinguishers

7. Safety – Emergency Showers

8. Clean Room Protocol - Purpose • Promote Successful Clean Room Operations • Ensure Safety in the Clean Environment • Provide Operational Conditions that Meet Process & User Needs

9. Perspective • The protocol provides basic awareness and general guidelines for clean room users • Successful clean room operation relies on each user’s understanding, participation and self discipline • The success of each user relies on trust, understanding and shared responsibility among all users

10. What is a Clean Room? A clean environment designed to reduce the contamination of processes and materials. This is accomplished by removing or reducing contamination sources.

11. Principles of the Clean Environment • Air is highly (HEPA) filtered (99.99% @ 0.3m) • Layout should minimize particle sources in filtered air stream • Air flow should remove most particles generated by process

12. Types of Contamination • Particulate Dust, skin, hair, makeup… • Chemical Oil, grease, metal ions, perfume… • Biological Bacteria, fungi, • Radiation Ultraviolet light…

13. Particle Characteristics • 50 micron particles are visible • Average human hair is about 100 microns • Time to fall 1 meter in still air • 33 seconds for 10 micron particle • 48 minutes for 1 micron particle • Humans generate >1x105 particles per minute when motionless (fully gowned) • Humans can generate >1x106 particles when walking in the clean room

14. Contamination Sources • People ~75% • Ventilation ~15% • Room Structure ~5% • Equipment ~5%

15. Contamination Control • Personnel Control • Dress code • Personal Hygiene • Gowning • Environmental Control • Entrance and exit • Materials and supplies • Cleaning and maintenance • Atmospheric

16. Dress Code • No sleeveless shirts • No shorts or skirts • No slippers or sandals • No jewelry that can puncture garments or gloves • Avoid clothing that sheds

17. Personal Hygiene • Control Dermatitis & Dandruff • Do not smoke before entry • Wait at least 20 min. after smoking to enter the clean room • No chewing gum or tobacco • No Cosmetics should be worn • Facial hair will need to be covered

18. Gowning • Proper gowning order • Hair cover • Shoe covers • Mouth cover (only for those with mustache or beard) • Coverall • Booties • Gloves • Safety Glasses The use of gloves in the e-LINE room is not obligatory, but ONLY in this room.

19. Gowning Basics • Garments should not be removed from clean room unless in approved container • Don’t walk out of the clean room with your garments on • Change garments when soiled or showing any visible signs of wear • Don’t reach inside your garment while in the clean room

20. Garment Reuse and Storage • Reusable – Store in the Gowning Room • Coveralls • Booties (not the blue disposables) • Safety Glasses • Not Reusable – Throw in trash • Hair cover • Blue disposable shoe covers • Gloves • Mouth cover

21. Entry & Exit • The use of the access card is a MUST (entry and exit) • Enter and exit quickly • Each user must use their own access card including visitors • Use the passthrough access for small objects

22. Materials and Supplies • Do not carry non-clean room items into the clean room • Do not carry clean room items out of the clean room • Do not use pencils or erasers • Paper should be kept in a plastic sleeve • Do not cut the clean room wipers • Clean everything you carry into the clean room

23. Chemicals • Do not take new chemicals into the clean room without permission of Noa Mazurski • Always read MSDS for every chemical you use • Large quantities of chemicals must be stored outside the clean room • Chemicals inside the clean room should be properly stored in their storage cabinets • All chemical containers should be clearly labeled with their contents and Hazard Classification • Unattended chemicals and experiments should be labeled with the owners name, immediate contact number, list of all chemicals involved, and estimated time of return or completion.

24. Chemical Handling • Do not transport chemicals in open containers • Chemicals should be used inside approved hoods • Full apron, Trionic gloves and full face shield are required for using all acids • Gloves, lab coat, and safety glasses are considered minimum personal protective equipment when handling ANY chemical

25. Chemical Handling • In case of a small spill • Inform all users in the clean room • Clearly mark the affected area • Use appropriate absorbent material to clean up the spill • In case of large spill • Inform all users in the clean room • Clearly mark the affected area and evacuate • Contact UNF staff immediately

26. Chemical Handling • Chemical waste should be properly disposed in the appropriate waste container into the hoods • No chemicals may be poured down the drains • Waste containers should be properly marked as such • If you have questions about disposal contact a staff member

27. In Case of Emergency • Always follow the rules set forth by UNF staff • If an emergency requires evacuation, leave the clean room immediately, do not stop to un-gown • Inform other users before leaving

28. Equipment use • All users must be trained before using any equipment • All equipment use should be scheduled • Before operating any equipment check with UNF staff if it is useable • If you are unable to use scheduled time please delete your reservation • It is every users responsibility to report damaged or malfunctioning equipment • It is every users responsibility to properly operate and clean each piece of equipment that they use

29. Housekeeping • Every user is responsible for keeping the clean room clean • Always clean your workspace before leaving • Don’t leave or store items on or in equipment • Store your personal items (samples, wafers, tools) in the locker located in the clean room main corridor • Do not set liquids on any equipment • Properly store all materials before leaving the clean room • Last one out should make sure the room is in a safe idle mode

30. Violations of Rules • First time • Warning • Report to Advisor • Second time • Suspension of access • Report to Advisor • Retraining may be required • Third Offense • Suspension of access • Report to Advisor • Access will not be renewed until an acceptable resolution is reached by the UNF Managing • Clean Room Protocol re-training will be required

31. Services rates • Clean room use: 5$ per hour • In addition to the clean room fee, each system has its own rate – consult the nanocenter website for details(http://www.nanoscience.huji.ac.il/unf/info.htm) • Incorrect use of the ID card for enter or exit the clean room confuses the doors control system. In case of uncertainty on the worked hours for an specific day, 8 hours will be taken into account.