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-Introduction to- Diamond-Like Carbon Coatings

-Introduction to- Diamond-Like Carbon Coatings. Miikka Multaharju. Contents. Composition and Structure Deposition Properties Applications Summary. Amorphous Carbon. Electrically insulating Chemically inert Optically transparent Hydrogen stabilizes the (diamond) sp 3 -bonding

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-Introduction to- Diamond-Like Carbon Coatings

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  1. -Introduction to-Diamond-Like CarbonCoatings Miikka Multaharju

  2. Contents • Composition and Structure • Deposition • Properties • Applications • Summary

  3. AmorphousCarbon • Electrically insulating • Chemically inert • Optically transparent • Hydrogen stabilizes the (diamond) sp3-bonding • Internal stresses • Not exactly amorphous Pierson, H.O. Handbook of Carbon, Graphite, Diamond and Fullerenes - Properties, Processing and Applications. William Andrew Publishing/Noyes. 1993. pp.337-355. ISBN: 978-0-8155-1339-1.

  4. AmorphousCarbon • DLC films are nano- to microcrystalline • Not exactly amorphous • Called amorphous • Metastable state http://en.wikipedia.org/wiki/File:Ta_C_structure.jpg

  5. Carbonwithhydrogen • Graphite • Diamond • Polyethene • DLC

  6. Composition and Structure • Differentcompositions • sp2 : sp3 : H → a-C : H • Si : Ti : Mo : W : Ge → carbideformers • Silicideformers → intermediateSi-layer • Nitrides • Laminatedstructures • Adhesion, loadcarrying, wear, contact, friction, chemicalproperties http://www.hefusa.net/pvd_coating/DLC-coatings.html

  7. Deposition • Proper cleaning of the substrate required • Uniform/conformal layer wanted • Carbon (graphene) target or reactive gases e.g. methane or acetylene • DLC-coating planarizes the surface Pierson, H.O. Handbook of Carbon, Graphite, Diamond and Fullerenes - Properties, Processing and Applications. William Andrew Publishing/Noyes. 1993. pp.337-355. ISBN: 978-0-8155-1339-1.

  8. Deposition Methods • PhysicalVapor Deposition (PVD) • The optimum energy for C+ ion beams is about 100–120 eV • Plasma-EnhancedChemical Vapor Deposition (PECVD) • Pulsed Laser Deposition (PLD) • Filtered Cathodic Arc Plasma Accelerator Deposition (FCAPAD)

  9. Carbon in comparison Pierson, H.O. Handbook of Carbon, Graphite, Diamond and Fullerenes - Properties, Processing and Applications. William Andrew Publishing/Noyes. 1993. pp.337-355. ISBN: 978-0-8155-1339-1.

  10. Properties of DLC Pierson, H.O. Handbook of Carbon, Graphite, Diamond and Fullerenes - Properties, Processing and Applications. William Andrew Publishing/Noyes. 1993. pp.337-355. ISBN: 978-0-8155-1339-1.

  11. Properties of HardCoatings http://www.hefusa.net/pvd_coating/DLC-coatings.html DIARC® ToolCoatings.pdf. http://www.diarc.fi/images/DIARC%20Tool%20Coatings_2013.pdf

  12. Applications • Hardcoatings • Wear, friction, erosion, corrosion • Electronics • Semiconductingproperties • Optics • Anti-reflection • Laser optics • Barrier • Lithography, diffusion http://www.pvd-dlc-coatings.com/ http://www.hefusa.net/pvd_coating/DLC-coatings.html

  13. Summary • Definedby: • Structure • Deposition • Composition • Properties • Applications • Wear+friction resistance

  14. References • Pierson, H.O. Handbook of Carbon, Graphite, Diamond and Fullerenes - Properties, Processing and Applications. William Andrew Publishing/Noyes. 1993. pp.337-355. ISBN: 978-0-8155-1339-1. • Bunshah, R.F. Handbook of HardCoatings. William Andrew Publishing/Noyes. 2001. pp.???. ISBN: 978-0-8155-1438-1. • http://www.hefusa.net/pvd_coating/DLC-coatings.html • DIARC® Tool Coatings.pdf. http://www.diarc.fi/images/DIARC%20Tool%20Coatings_2013.pdf

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