Nanometric thickness TiN sputtering coating for RF windows
Nanometric thickness TiN sputtering coating for RF windows. E. Balsamo , M. Lacroix, A. Benardais, L.Grandsire, A. Frigo, and V. Palmieri, A. Variola. LNL,11 -10 - 2006. Outline: RF windows TiN characteristics and properties Methods : Reactive sputtering
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