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Nanolithography And Nanofabrication ELEC 7950 Special Topics on Nanoscale Science and Technology Summer 2003 Y. Tzeng Professor, ECE Auburn University. http://personal.cityu.edu.hk/~appkchu/AP4120/5v.pdf. Intel’s lithography Roadmap.

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    1. Nanolithography And Nanofabrication ELEC 7950 Special Topics on Nanoscale Science and Technology Summer 2003 Y. Tzeng Professor, ECE Auburn University

    2. http://personal.cityu.edu.hk/~appkchu/AP4120/5v.pdf

    3. Intel’s lithography Roadmap www.intel.com/technology/itj/2002/volume06issue02/ art06_lithographyroadmap/p03_roadmap.htm

    4. Sub-wavelength lithography www.intel.com/technology/itj/2002/volume06issue02/ art06_lithographyroadmap/p03_roadmap.htm

    5. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    6. TeraHertz transistor with 15nm gate Transistor physics and material properties will not prevent continuing on the path of Moore’s Law for some years to come. The key issue will be the availability of lithography equipment that can pattern sub-50nm features, in high-volume applications, at affordable costs. www.intel.com/technology/itj/2002/volume06issue02/ art06_lithographyroadmap/p03_roadmap.htm

    7. http://personal.cityu.edu.hk/~appkchu/AP4120/5v.pdf

    8. http://personal.cityu.edu.hk/~appkchu/AP4120/5v.pdf

    9. http://users.ece.gatech.edu/~alan/11-6-Mohanty-Extreme%20UV%20Litho.pdfhttp://users.ece.gatech.edu/~alan/11-6-Mohanty-Extreme%20UV%20Litho.pdf

    10. http://users.ece.gatech.edu/~alan/11-6-Mohanty-Extreme%20UV%20Litho.pdfhttp://users.ece.gatech.edu/~alan/11-6-Mohanty-Extreme%20UV%20Litho.pdf

    11. http://personal.cityu.edu.hk/~appkchu/AP4120/5v.pdf

    12. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    13. http://users.ece.gatech.edu/~alan/11-6-Mohanty-Extreme%20UV%20Litho.pdfhttp://users.ece.gatech.edu/~alan/11-6-Mohanty-Extreme%20UV%20Litho.pdf

    14. http://users.ece.gatech.edu/~alan/11-6-Mohanty-Extreme%20UV%20Litho.pdfhttp://users.ece.gatech.edu/~alan/11-6-Mohanty-Extreme%20UV%20Litho.pdf

    15. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    16. http://users.ece.gatech.edu/~alan/11-6-Mohanty-Extreme%20UV%20Litho.pdfhttp://users.ece.gatech.edu/~alan/11-6-Mohanty-Extreme%20UV%20Litho.pdf

    17. Intel adopts the following strategy: • Rapid transition to each new generation of lithography equipment, i.e. shorter wavelengths. • Using fast (high-run-rate) lithography tools. • Reusing lithography equipment over multiple process generations. • Intel expects that this strategy will allow lithography to continue to be affordable into the 45nm technology generation and beyond. www.intel.com/technology/itj/2002/volume06issue02/ art06_lithographyroadmap/p03_roadmap.htm

    18. X-Ray Lithography http://personal.cityu.edu.hk/~appkchu/AP4120/5v.pdf

    19. Electron Beam Lithography http://personal.cityu.edu.hk/~appkchu/AP4120/5v.pdf

    20. Focused Ion Beam Lithography http://personal.cityu.edu.hk/~appkchu/AP4120/5v.pdf

    21. Atom Optics G. Timp, R.E. Behringer, D.M. Tennant, J.E. Cunningham, M. Prentiss and K.K. Berggren, “Using Light as a Lens for Submicron, Neutral-Atom Lithography,” Physical Review Letters 69(11), 14 September 1992. http://www.iap.uni-bonn.de/ag_meschede/atomoptik/nist.pdf

    22. AFM images http://www.iap.uni-bonn.de/ag_meschede/atomoptik/nist.pdf

    23. http://www.iap.uni-bonn.de/ag_meschede/atomoptik/nist.pdf

    24. http://physics.ust.hk/phkywong/presentations/bec.ppt

    25. http://physics.ust.hk/phkywong/presentations/bec.ppt

    26. http://physics.ust.hk/phkywong/presentations/bec.ppt

    27. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    28. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    29. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    30. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    31. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    32. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    33. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    34. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    35. http://www.stanford.edu/group/quate_group/LithoFrame.html

    36. http://www.stanford.edu/group/quate_group/LithoFrame.html

    37. http://www.stanford.edu/group/quate_group/LithoFrame.html

    38. http://www.stanford.edu/group/quate_group/LithoFrame.html

    39. http://www.stanford.edu/group/quate_group/LithoFrame.html

    40. http://www.stanford.edu/group/quate_group/LithoFrame.html

    41. http://www.stanford.edu/group/quate_group/LithoFrame.html

    42. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    43. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    44. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    45. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    46. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    47. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    48. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    49. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf

    50. http://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdfhttp://www-inst.eecs.berkeley.edu/~ee143/f2002/Lectures/Lec_28.pdf