Terrestrial short wavelength metrology for solar science
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Terrestrial short wavelength metrology for solar science. Focus of research: EUV sources & metrology Industrially relevant EUV applications Reflectometry Nanostructuring Imaging. Reflectometer. High power EUVL source. High brightness metrology source. Laboratory exposure tool.

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Terrestrial short wavelength metrology for solar science
Terrestrial short wavelength metrology for solar science

  • Focus of research:

    • EUV sources & metrology

    • Industrially relevant EUV applications

      • Reflectometry

      • Nanostructuring

      • Imaging

Reflectometer

High power EUVL source

High brightness metrology source

Laboratory exposure tool

Defect inspection microscope

Stefan Herbert

Scientific Detector Workshop 2013

9th October 2013, Florence, Italy


Terrestrial short wavelength metrology for solar science1
Terrestrial short wavelength metrology for solar science

  • Motivation ofattendance:

    • Space scienceapplicationsand EUV lithography/metrologyshare:

      • Vacuum- andcleanlinenessrequirements - highestqualitystandards

      • Challenges, connectedwith EUV-specificopticalequipmentanddetectors

    • Combine competencesandexperiencesfor mutual benefit

  • Contributionforjointactivities:

    • Plasma sourcewith quasi-solar emissionspectrum

    • Flexible metrologytestbenchforcharacterizationofoptics& detectors in theEUV

    • Outgassing studies in vacuum

Stefan Herbert

Scientific Detector Workshop 2013

9th October 2013, Florence, Italy


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