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Secondary Ion Mass Spectroscopy Mass Spectroscopy - PowerPoint PPT Presentation


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Outline. ???SIMSSIMS? ??MSMS? ?? ??. Primary ion beam source?? ???? ??SIMS / MS ?,??. Sims / Ms Spectroscopy ???. . . . . . Sample. Ionsource. Mass Spectroscopy. Detector. DataSystem. . . . . ArXeN2Cs . . . TOFQuadrupoleMagnetic-sector. Micro-channel PlateElectron MultiplierFar

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