MEMS MOEMS Nano. Workshop. 10 MEMS Products & Case Histories. Ken Gilleo PhD ET-Trends LLC. 92%. Newer. OLD. Silicon Load Cell for Loads up to 1000 kg. An array of capacitors is used instead of a single capacitor to compensate for nonhomogeneous force distributions. .
10 MEMS Products & Case Histories
An array of capacitors is used instead of a single capacitor to compensate for nonhomogeneous force distributions.
By sensing the pressure drop over a fixed hydraulic resistance with use of pressure sensors, the flow through the shunt resistor can be obtained.
The monolithic sensor consists of two capacitive read-out pressure sensors, connected by a resistance channel.
Because two pressure sensors are used (relative to atmospheric pressure) the sensor can be used both to measure flow-rate as well as pressure
Knowles articles on web
The microphone consists of two chips, the MEMS chip and an application-specific integrated circuit (ASIC), both of which share the same package on a surface-mounted device. The MEMS consists of a rigid, perforated back electrode and a flexible silicon membrane that serves as a capacitor, transforming acoustic pressure waves into capacitive variations. The ASIC detects these variations, converts them into electrical signals and passes them to the appropriate processing devices, such as a baseband processor or amplifier.
12 Summary & Future
Much of HP’s MEMS is simple ink jet chips with no moving parts.