slide1 n.
Download
Skip this Video
Loading SlideShow in 5 Seconds..
10 MEMS Products & Case Histories PowerPoint Presentation
Download Presentation
10 MEMS Products & Case Histories

Loading in 2 Seconds...

play fullscreen
1 / 16

10 MEMS Products & Case Histories - PowerPoint PPT Presentation


  • 134 Views
  • Uploaded on

MEMS MOEMS Nano. Workshop. 10 MEMS Products & Case Histories. Ken Gilleo PhD ET-Trends LLC. 92%. Newer. OLD. Silicon Load Cell for Loads up to 1000 kg. An array of capacitors is used instead of a single capacitor to compensate for nonhomogeneous force distributions. .

loader
I am the owner, or an agent authorized to act on behalf of the owner, of the copyrighted work described.
capcha
Download Presentation

PowerPoint Slideshow about '10 MEMS Products & Case Histories' - amma


An Image/Link below is provided (as is) to download presentation

Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author.While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server.


- - - - - - - - - - - - - - - - - - - - - - - - - - E N D - - - - - - - - - - - - - - - - - - - - - - - - - -
Presentation Transcript
slide1

MEMS MOEMS Nano

Workshop

10 MEMS Products & Case Histories

  • Ken Gilleo PhD
  • ET-Trends LLC

92%

slide4

Silicon Load Cell for Loads up to 1000 kg

An array of capacitors is used instead of a single capacitor to compensate for nonhomogeneous force distributions.

slide5

Micro fluid handling systems

By sensing the pressure drop over a fixed hydraulic resistance with use of pressure sensors, the flow through the shunt resistor can be obtained.

The monolithic sensor consists of two capacitive read-out pressure sensors, connected by a resistance channel.

Because two pressure sensors are used (relative to atmospheric pressure) the sensor can be used both to measure flow-rate as well as pressure

slide6

20020102004 - Knowles

From various

Knowles articles on web

slide7

Infineon

The microphone consists of two chips, the MEMS chip and an application-specific integrated circuit (ASIC), both of which share the same package on a surface-mounted device. The MEMS consists of a rigid, perforated back electrode and a flexible silicon membrane that serves as a capacitor, transforming acoustic pressure waves into capacitive variations. The ASIC detects these variations, converts them into electrical signals and passes them to the appropriate processing devices, such as a baseband processor or amplifier.

session summary
Session Summary
  • MEMS Mfgs. pioneered packaging
    • Inertial sensors
    • Pressure sensors
    • Ink jets
    • Microphones
  • Most attempt to stay within infrastructure
  • MEMS packing vendors are emerging
  • No clear trend for packaging outsourcing
slide11

MEMS MOEMS Nano

Workshop

12 Summary & Future

  • Ken Gilleo PhD
  • ET-Trends LLC

98%

slide13

Top MEMS Co’s

Much of HP’s MEMS is simple ink jet chips with no moving parts.

slide14

MOEMS

Mkt.

By region

trends
Trends
  • New MEMS startups will be fabless
  • More MEMS good fab services
  • More reuse
    • MUMPS standards
    • Existing libraries
  • Packaging
    • Still custom designed by MEMS device designer
    • Some use of MEMS-specific packagers
final summary
Final Summary
  • Adding motion to chips is a very big deal
  • MEMS: a top technology for 21st century
  • MEMS: long lifetime (beyond silicon electronics)
  • MEMS and Nano are compatible, synergistic
  • MEMS: greatest packaging challenge
  • MEMS packaging should work for nano