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ENIAC

System miniaturization brings us: function enhance more reliable save material and energy cost down. ENIAC. (1946). TX-0. (1956). IBM 360. 第一台电子管计算机. (1964). Osborne I. 第一台晶体管计算机. (1981). Libretto 110CT. Today. 第一台集成电路计算机.

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ENIAC

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  1. System miniaturization brings us: function enhance more reliable save material and energy cost down ENIAC (1946) TX-0 (1956) IBM 360 第一台电子管计算机 (1964) Osborne I 第一台晶体管计算机 (1981) Libretto 110CT Today 第一台集成电路计算机 第一台便携式计算机

  2. Look into the MEMS • MEMS is never a science category but a technical solution for many application fields. However, MEMS needs many categories of scientific and engineering knowledge • MEMS is Art and Science, needs not only IQ but also EQ • Along with shrinking from Macro-machine to MEMS : • The most knowledge already existing • 2. But two things adapting mechanics to micro scale that are of great importance in MEMS • 1) Electrostatic effect; 2) Air damping control

  3. Comb-drive Electrostatic Effect • The work initiated by Bill Tang and Roger Howe should have been cited for many times. • But actually no people would like to do so.

  4. Liquid Manipulation Using ElectroWetting On Dielectric (EWOD) by C-J Kim et al，UCLA

  5. Electric feedback damping conditioning Electrostatic Driving Wanted -ke / km =   ’ =  /(1+ )1/2 f0’= f0(1+ )1/2 Electric Tuning km > 0, ke < 0 f0 = [(km- ke )/m]1/2 Electric feedback C

  6. So now you know: How does E and M couple each other in MEMS

  7. Electrostatic Pull-in Xinxin Li et al, J. Micomech. Microeng., 2000

  8. Avoiding in MEMS Sensor offset: sensitivity: nonlinearity: MH Bao et al, Sens. Actuators, 2002

  9. Improvement: Push-pull balance and feedback loop

  10. 17µm Positive utilization of Pull-in DMD by TI H Yang et al, IEEE SENSORS 2005

  11. Air damping Problem in existing Christian Model for rare air or low vacuum MH Bao et al, J. Micromech. Microeng. 2003

  12. Bao Model based on energy method • Christian Model Momentum method for Q，big difference from testing results That not considered That not related Energy method for Q, with test verification Influenced by adjacent electrode considered Related to geometry

  13. I－test，II－Christian，III－Bao model

  14. Equivalent cell radius rc Hole radiusro b=ro/rc Modified Reynolds Equation for squeeze film damping of perforated plate structure MH Bao et al, J. Micromech. Microeng. 2002

  15. So now you know: Why I chose this Bao’s textbook for your course Now I assign the 1st homework: pre-reading

  16. The 2nd part of your homework: Thinking about • What is MEMS by your thinking? try to give your own definition. try your best to use four English words with their capitals in the order of M, E, M and S • For example: Miniaturized Everything Making Sense • 2. Why people use MEMS? i.e. the advantage of MEMS • 3. Who is the Korean researcher doing micro-fluidic bio-MEMS? And who does NEMS probes • 4. How MEMS can be put into volume production? i.e. make big money • 5. Which kind of MEMS work you are the most interested in?

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