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ION PUMPS

ION PUMPS. By: Nima Moghimian. Why pump?. Why vacuum?. What is a good vacuum?. What is a good vacuum?. NO Vacuum. Rough Vacuum. Low Vacuum. High Vacuum (HV). Ultra High Vacuum (UHV). Pa. 1Pa = 7.5 x 10 -3 Torr. Types of pumps. NO Vacuum. Rough Vacuum. Low Vacuum.

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ION PUMPS

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  1. ION PUMPS By: NimaMoghimian

  2. Why pump? Why vacuum? What is a good vacuum?

  3. What is a good vacuum? NO Vacuum Rough Vacuum Low Vacuum High Vacuum (HV) Ultra High Vacuum (UHV) Pa 1Pa = 7.5 x 10-3Torr

  4. Types of pumps NO Vacuum Rough Vacuum Low Vacuum High Vacuum (HV) Ultra High Vacuum (UHV) Ion pumps Turbomolecular pumps Diffusion pumps Rotary and Dry pumps Pa

  5. SEM pumps 10-8Pa 105Pa 10-4Pa 10-1Pa

  6. Ion pump anode N S Ti Ti + DC Power supply _

  7. Ion pump + + + + + + + + + + + N S - - - - - - - - - - - - e e e e e + + + + + + + + + + + e + DC Power supply _

  8. + + + + + + + + e _ _ _ _ _ _ + Collision Ionization Sputtering Condensation e +

  9. N S Chemisorption Electrical attraction + DC Power supply _

  10. _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ + + + + + + + + + + + + + + N S e e + + + + + + + + + + + + + + + DC Power supply _ + +

  11. Ion pump features • No Oil • No moving parts • Only efficient at high vacuums

  12. Questions

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