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Mega ION: System Diagram

Mega ION: System Diagram. High Level Float. Process Chamber. HEAT (option). Nitrogen Dryer. S5. S1. Fill. S2. Wash. S2. Test. S3. RES. SENSOR. Drain. S4. S1. S5. Dry. IAC. S2. S4. P1. S3. S2. (. ). Low Level Float. Closed Fluid Reservoir. IONIC ABSORPTION CHAMBER.

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Mega ION: System Diagram

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  1. Mega ION: System Diagram

  2. High Level Float Process Chamber HEAT(option) Nitrogen Dryer S5 S1 Fill S2 Wash S2 Test S3 RES. SENSOR Drain S4 S1 S5 Dry IAC S2 S4 P1 S3 S2 ( ) Low Level Float Closed Fluid Reservoir IONIC ABSORPTION CHAMBER S1

  3. 高液位浮标 清洗腔室 加热 选件 氮气干燥 S5 S1 注入 S2 清洗 S2 测试 S3 电阻率 探头 排泄 S4 S1 S5 干燥 IAC S2 S4 P1 S3 S2 ( ) 低液位浮标 封闭的溶剂槽 离子吸附 腔室 S1


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