RF Matching. Network. Capacitance. Thermocouple feedthrough. Manometer. O-ring joint. To. Flow Controller. pump. Oxygen. silicon substrate holder. Flow Controller. Argon. Heater wire feedthrough. Bubbler for Titanium (IV) Isopropoxide. Experimental Methods. Motivation.
Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author.While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server.
Titanium (IV) Isopropoxide
Sputtering of TiO2 on Si(100)
Annealing of TiO2 on Si(100)
Sputtering and Thermal Effects on the Titania/Si Interface
Patrick R. McCurdy, Laura Sturgess, Sandeep Kohli, and Ellen R. Fisher, Colorado State University
SEM/SAM of Annealed TiO2 Films
SAM of Si—950oC anneal