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Project Update

Project Update. 04/17/2014. Stoichiometry by Positioning. To test the deposition characteristics of the chamber, a long sample was placed in the chamber and analyzed at several positions Best results are obtained when the sample is closest to the center of the chamber. .

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Project Update

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  1. Project Update 04/17/2014

  2. Stoichiometry by Positioning • To test the deposition characteristics of the chamber, a long sample was placed in the chamber and analyzed at several positions • Best results are obtained when the sample is closest to the center of the chamber.

  3. STO Composition Tests • STO Depositions were performed using a constant Ti plasma and varying Sr power • There is a definite correlation between Sr plasma power and Sr composition in STO

  4. BSO Composition Tests • There is also a correlation between Ba plasma power and Ba composition in BSO

  5. BSTO Composition Tests on Silicon • BSTO with Ba from 0% Ba to 100% Ba. A clear correlation is present between Ba content and lattice constant as expected • WDS confirms exact composition of the films.

  6. BSTO Tests On Silicon • Lattice Spacing by XRD shows a linear increase with increased Ba content

  7. Optical Measurements • Measurements with the spectroscopic ellipsometer show that the films with more barium do have a higher index. • There is not, however, an exact linear correlation between composition and index.

  8. Impedance Spectroscopy • Patterned capacitors to test the impedance of these BSTO films • Capacitance will have a voltage dependence if the films are ferroelectric Cu Ag BSTO AZO Si

  9. Impedance Measurements • Impedance measurements were taken at 100khz • Impedance measurements show some correlation between applied voltage and impedance. This may indicate the presence of ferroelectricity.

  10. Waveguide Design • Created Design in CAD • Based on Previous Design • Also may need revisions if SiO2 is to be used as isolating layer

  11. Future Plans • Impedance measurements on a conductive surface • Make more films to measure impedance • Simulations • Waveguide Fabrication

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