Four Point Probe and Hall measurement

# Four Point Probe and Hall measurement

## Four Point Probe and Hall measurement

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1. Four Point Probe and Hall measurement Adviser：Kuen-Hsien Wu Student：Wei-Ming Lin

2. Outline 1.Introduction 2. Principle 3. Operation 4. Conclusions 5. References

3. Introduction Four-point probe measurement instrument mainly used for measuring the resistance of semiconductor thin films, that sheet resistance. Sheet resistanceis one of the important characteristics of a conductive material, particularly a conductive film. Sheet resistance will be the film thickness、grain size Inch and the impurity concentration and other factors. Therefore, in the course of the process, often carefully monitor sheet resistance .

4. Principle I ρ＝V/I．W ．CF Rs = V/I ．CF Asd/s＞20 → CF~4.54 V W S S S sample d

5. Operation 四點探針機台

6. Operation 上機台輸入固定電流 下機台量測出電壓

7. Operation 橫桿下拉 sample

8. Operation 藍點要恆亮 Rs = 4.54 V/I 0.154767mV/1 μ A × 4.54 =701Ω

9. Conclusions 1 Sample size and shape does not affect the measurement results, therefore, the sample does not have to make special specifications . 2 Four-point probe measurements silicon wafer with a metal film sheet resistancethe most common method. 3 Simple and fast, but more troublesome problem is to calculation results .

10. Introduction In 1978, Edwin H.Hall input current in theconductor applied magnetic field. Conductor and the current direction the ends of the vertical , can measure the induced voltage . Can determine the polarity and concentration of carriers , Known as the Hall effect .

11. Principle Z F＝ qVxBz Bz X qεy ＝ qVxBz εy ＝ VxBz y VH＝ εyW ＋ p-type VH － εx εy W Vx 正 P-type 負 n-type ＋ － ρ ＝RH /μp

12. Operation

13. Operation 將sample固定在量測基板上

14. Operation 將量測基板插入量測架上

15. Operation 在量測座上放磁石並進行量測

16. Operation 開啟量測軟體

17. Operation 出現霍爾量測系統畫面

18. Operation 輸入膜厚

19. Operation 得到data

20. Hall measurements VS.Four-point probe

21. Conclusions 1 Hall effect is mainly for detecting a semiconductor material,film samples can be measured resistivity, carrier concentration, carrier polarity, and mobility. 2 Rapid measurement , Simple operation, simple to operate a computer, you can complete the measurement step , the film is detected with a great help.

22. References http://140.116.176.21/www/technique/SOP/SOP%204-Point%20Probe.pdf四點探針儀器介紹 http://ezphysics.nchu.edu.tw/prophys/basicexp/expnote/hall/hall_97Feb.pdf物理實驗-霍爾效應 http://mast-tech.com.tw/Resistivity%20Measurement.pdf 科豐國際有限公司

23. Thank You