Four Point Probe and Hall measurement Adviser：Kuen-Hsien Wu Student：Wei-Ming Lin
Outline 1.Introduction 2. Principle 3. Operation 4. Conclusions 5. References
Introduction Four-point probe measurement instrument mainly used for measuring the resistance of semiconductor thin films, that sheet resistance. Sheet resistanceis one of the important characteristics of a conductive material, particularly a conductive film. Sheet resistance will be the film thickness、grain size Inch and the impurity concentration and other factors. Therefore, in the course of the process, often carefully monitor sheet resistance .
Principle I ρ＝V/I．W ．CF Rs = V/I ．CF Asd/s＞20 → CF~4.54 V W S S S sample d
Operation 上機台輸入固定電流 下機台量測出電壓
Operation 橫桿下拉 sample
Operation 藍點要恆亮 Rs = 4.54 V/I 0.154767mV/1 μ A × 4.54 =701Ω
Conclusions 1 Sample size and shape does not affect the measurement results, therefore, the sample does not have to make special specifications . 2 Four-point probe measurements silicon wafer with a metal film sheet resistancethe most common method. 3 Simple and fast, but more troublesome problem is to calculation results .
Introduction In 1978, Edwin H.Hall input current in theconductor applied magnetic field. Conductor and the current direction the ends of the vertical , can measure the induced voltage . Can determine the polarity and concentration of carriers , Known as the Hall effect .
Principle Z F＝ qVxBz Bz X qεy ＝ qVxBz εy ＝ VxBz y VH＝ εyW ＋ p-type VH － εx εy W Vx 正 P-type 負 n-type ＋ － ρ ＝RH /μp
Conclusions 1 Hall effect is mainly for detecting a semiconductor material,film samples can be measured resistivity, carrier concentration, carrier polarity, and mobility. 2 Rapid measurement , Simple operation, simple to operate a computer, you can complete the measurement step , the film is detected with a great help.
References http://126.96.36.199/www/technique/SOP/SOP%204-Point%20Probe.pdf四點探針儀器介紹 http://ezphysics.nchu.edu.tw/prophys/basicexp/expnote/hall/hall_97Feb.pdf物理實驗-霍爾效應 http://mast-tech.com.tw/Resistivity%20Measurement.pdf 科豐國際有限公司