'Sensor material' presentation slideshows

Silicon Drift Detectors: Understanding the Advantages for EDS Microanalysis

Silicon Drift Detectors: Understanding the Advantages for EDS Microanalysis. Patrick Camus, PhD Applications Scientist March 18, 2010. EDS Detector Requirements. Detect whole energy range of x-rays 50 eV (Li-K) to incident beam energy SEM: up to 30 keV

491 views • 34 slides

Radiation Hard Sensors for the BeamCal of the ILC

437 views • 32 slides

Radiation Hard Sensors for the BeamCal of the ILC

322 views • 32 slides

Bulk MEMS 2013, Part 1 sami.franssila@aalto.fi

Bulk MEMS 2013, Part 1 sami.franssila@aalto.fi. Types of MEMS. Bulk MEMS: anisotropic wet or DRIE of bulk silicon SOI MEMS: DRIE or wet silicon etching Surface MEMS: thin films on top of a wafer Integrated MEMS: CMOS and MEMS on same chip. Through-wafer nozzles.

743 views • 24 slides