Mems gyroscope - PowerPoint PPT Presentation

Microrobotics

Microrobotics. Updates. Lab #4 results Lab #5 starts next week (last lab) Instructions distributed today HW #5 due today HW #6 distributed today (last HW). Introduction to Microrobotics. The physics of scaling Fabrication methods MEMS SCM Case studies MEMS gyroscope

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Knee Rehabilitation Using Range of Motion Exercise Feedback

Local Server. Receives data. Knee sensors. Analyzes data. Knee Rehabilitation Using Range of Motion Exercise Feedback. Measuring data. Infer results. z. z. z. z. y. y. y. y. x. x. x. x. Receiver (PDA / Smartphone). Display data &amp; info.

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MEMS Gyroscope with Electrostatic Comb Actuation and Differential Capacitance Sensing

Mass. driving fingers. driving fingers. silicon bonding frame. driving beams. sensing mass. sensing beams. Silicon (fixed). Silicon (floating). MEMS Gyroscope with Electrostatic Comb Actuation and Differential Capacitance Sensing Haifeng Dong, Zheng Yao, Advisor: Xingguo Xiong

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