'Litho metrology' presentation slideshows

Litho metrology - PowerPoint PPT Presentation

Metrology Roadmap ERD and ERM Update - Stresa

Metrology Roadmap ERD and ERM Update - Stresa

Metrology Roadmap ERD and ERM Update - Stresa. Europe Ulrich Mantz (Infineon) Dick Verkleij (Philips) Mauro Vasconi (ST) Japan Yuichiro Yamazaki (Toshiba) Kazuo Nishihagi (Technos) Korea Taiwan US Dan Herr (SRC) Steve Knight (NIST) Alain Diebold (Int. SEMATECH).

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674 views • 43 slides
Metrology Roadmap 2003 Update

Metrology Roadmap 2003 Update

Metrology Roadmap 2003 Update. Europe Ulrich Mantz (Infineon) Mauro Vasconi (ST) Japan Yuichiro Yamazaki (Toshiba) Kazuo Nishihagi (Technos) Korea Taiwan Fang-Cheng Chen (TSMC) J.H. Shieh (TSMC) B.C. (Harry) Perng (TSMC) US Steve Knight (NIST)

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400 views • 26 slides
Metrology Roadmap 7-06

Metrology Roadmap 7-06

Metrology Roadmap 7-06. Europe Bart Rijpers (ASML) Marco van der Haar (Panalytical) Thomas Hingst (Infineon) Dick Verkleij (FEI- Philips) Mauro Vasconi (ST) Japan Eiichi Kawamura (Fujitsu) Yuichiro Yamazaki (Toshiba) Masahiko Ikeno (Hitachi High-Technologies)

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392 views • 22 slides
Metrology Roadmap 2003 Update and ISMT Project Plans

Metrology Roadmap 2003 Update and ISMT Project Plans

Metrology Roadmap 2003 Update and ISMT Project Plans. Europe Ulrich Mantz (Infineon) could not travel Mauro Vasconi (ST) on phone Japan Yuichiro Yamazaki (Toshiba) Kazuo Nishihagi (Technos) Korea Taiwan US Steve Knight (NIST) Alain Diebold (Int. SEMATECH)

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345 views • 20 slides
Metrology Roadmap 4-06

Metrology Roadmap 4-06

Metrology Roadmap 4-06. Europe Bart Rijpers (ASML) Thomas Hingst (Infineon) Dick Verkleij (FEI- Philips) Mauro Vasconi (ST) Japan Eiichi Kawamura (Fujitsu) Yuichiro Yamazaki (Toshiba) Masahiko Ikeno (Hitachi High-Technologies) Korea Soobok Chin (Samsung)

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302 views • 10 slides
Metrology ITWG Report

Metrology ITWG Report

Metrology ITWG Report. 2002 Changes. Litho Metrology Change basis of CD Precision to Litho process variance on printed gate. Precision is even more difficult to achieve Add better discussion of why red (new color) LER is now off-line Interconnect

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161 views • 2 slides

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