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Ion doping - PowerPoint PPT Presentation

Diliman – Katipunan “Silicon Alley”

UP NEC SHONO WAFER FAB – named after deceased Sony Japanese researcher Dr. Shono, who donated the lab to UP. Equipment includes Plasma etchers Lithography tools (Photo, E-beam) SEM / Transmission Electron Microscope / E-beam writer Etching tools (RIE, Wet Etch) Ion Doping

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Ion doping - PowerPoint PPT Presentation

Diliman – Katipunan “Silicon Alley”