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Interference Assisted Lithography (IAL): A Way to Contain the Lithography Costs for the 32nm and 22nm Half-Pitch Device

Interference Assisted Lithography (IAL): A Way to Contain the Lithography Costs for the 32nm and 22nm Half-Pitch Device Generations . Rudi Hendel; David Markle; John S. Petersen; Andrew Barada; Periodic Structures, Inc. Zhilong Rao Applied Materials, Inc. . Presentation Overview.

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Fixed pitch pattern - PowerPoint PPT Presentation

Interference Assisted Lithography (IAL): A Way to Contain the Lithography Costs for the 32nm and 22nm Half-Pitch Device